摘要
激光扫描声学显微镜是一种新型的无损检测多层陶瓷电容器内部缺陷的测量技术。本文分析计算了该技术用于多层陶瓷电容器的一些设计参数和技术指标，阐述了实际实验系统，最后给出了一些样品的实验结果。
The scanning laser acoustic microscope is a new type of nondestructive testing technique for detecting the internal defects of multilayer ceramic capacitors(MLC).The theoretieal analyses and evalua-tions of parameters for a scanning laser acoustic microscope system are prasented and several practical experi-ments are illustrated.Some experimental results are also given in the paper.
出处
《压电与声光》
CSCD
北大核心
1994年第1期44-46,共3页
Piezoelectrics & Acoustooptics
关键词
声学显微镜
陶瓷电容器
无损检验
nondestructive testing,laser scanning acoustic microscope,multilayer ceramic capacitor
