摘要
分析了用于TEA CO2 激光器的Ernst电极在加工和装配过程中可能产生的误差对整个电极系统电场均匀性的影响。引入模拟软件ANSYS,利用有限元方法计算了 Ernst电极系统的静电场问题。计算结果给出了在电极表面曲线不连接或交错、电极中部曲线被磨平、上下电极水平错开、上下电极间距偏差和上下电极不平行时的电极表面电场的畸变情况和变化趋势。计算误差小于5×10-4。
Ernst electrode system's field uniformity in TEA CO2 lasers under the influence of manufacturing and positioning errors was analyzed in this paper. A simulation software - ANSYS was introduced as finite element method to calculate the electrostatic field of the Ernst electrode system. The research result gives the field distortion and the change trend of the electrode surface in the condition of non-connecting half profiles or overlapping half profiles, central flat profiles, horizontally misaligned electrodes, vertically misaligned electrodes and not parallel electrodes. The calculation error is less than 5 × 10-4.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2005年第3期302-306,共5页
Journal of Optoelectronics·Laser
