摘要
分析了微加工悬臂梁在横向冲击下的响应 .将悬臂梁看作一个质量分布参数系统 ,利用模态叠加法计算悬臂梁在冲击下的位移和应力分布 ,并根据位移和应力的最大值判断悬臂梁可能的失效模式 ,从而为MEMS器件的可靠性设计提供依据 .
The response of the micromachined cantilever to the transverse shock is analyzed by taking it as a distributed-parameter system.The displacements and stresses of the cantilever are formulated with the mode superposition method.The possible failure modes are estimated by the maximum displacements and stresses,therefore the reliability designs of MEMS can be improved.
