摘要
由于飞秒脉冲在烧蚀固体材料时的独特机制,在材料激光微加工方面有其突出的优点,表现出极大的应用潜力。本文主要就国内外多脉冲飞秒烧蚀研究的进展作一简介,包括多脉冲烧蚀的特点、现有的烧蚀机制分析及其应用前景等。
Because of the particular mechanism, there are many advantages in nu'cromacnining when using femtosecond pulses. For multiple pulses, there is some difference with single-shot pulses. In this article we will introduce the mechanism and the theoretical model of femtosecond multi -pulse laser ablation of materials, and explain the properties of multi -pulses laser -induced damage. Here the widespread application prospect is described too.
出处
《激光与光电子学进展》
CSCD
2003年第9期14-20,共7页
Laser & Optoelectronics Progress
关键词
飞秒激光
多脉冲
飞秒脉冲
烧蚀
微加工
优点
固体材料
micromachining
femtosecond laser
multiple pulses
incubation (cumulation) effect
