摘要
综述了相干计量技术在测长、光学波面误差检测、表面粗糙度测量中的应用,目前的状况及未来的发展趋势。
This paper presents an overview of the interferometry applied in length measurement, optical wavefront tasting and surface roughness measurement, and gives a brief introduction of its current situation and developing prospects.
出处
《光学仪器》
1993年第4期27-34,共8页
Optical Instruments
关键词
相干技术
干涉仪
检测
Interferometry, Interferometer, Testing.
