摘要
运用两电子组模型,考虑了射频放电中的α过程和γ过程两种电离机制,并结合流体模型,研究了中等气压下窄电极间隙容性耦合射频放电在运行模式转变区的等离子体密度以及电离速率分布等特性。理论研究表明,γ电离过程在高电流模式运行中起主要作用,并证实了此类放电中存在显著的电子摆钟效应,具有类似于空心阴极放电的特征。
A two-electron-group model for capacitively coupled radio-frequency (CCRF) glow discharge used to excite ion laser is developed. The model assumes electrons in the discharge zone are classified into two groups, i.e. bulk or plasma electrons and fast or secondary emission electrons. These two groups of electrons are responsible for α and γ processes respectively. Results from the model reveal that plasma parameters change largely at the transition regions between two operating modes. The ionization rates distribution at the high current mode of a narrow electrode gap RF discharge which is analog to a hollow cathode discharge demonstrates the pendulum effect exists in the CCRF discharge.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2004年第8期1049-1053,共5页
High Power Laser and Particle Beams
基金
广东省自然科学基金资助课题(980922)
关键词
射频放电
空心阴极放电
两电子组模型
Electric fields
Electron transport properties
Numerical methods
Plasmas
Poisson equation
