摘要
介绍了多孔硅气体传感器的原理和优点,综述了多孔硅气体传感器测量氮氧化物和几种有机气体的机理、方法及最新的研究进展,并分析了传感器的选择性和稳定性,展望了多孔硅气体传感器应用前景。
The principle and advantages of porous silicon gas sensor are described.The gas sensitive mechanism and technology as well as the progress of porous silicon gas sensor to detect nitrogen oxide and several organic gases are overviewed,then the stability and selectivity are analysed.Lastly,prospects of potential application of porous silicon gas sensor are presented.
出处
《传感器技术》
CSCD
北大核心
2004年第9期7-9,12,共4页
Journal of Transducer Technology
基金
河南省高校创新人才基金项目(1999-125)
关键词
多孔硅
气体传感器
灵敏度
稳定性
选择性
PS(porous silicon)
gas sensor
sensitivity
stability
selectivity
