摘要
用基于多普勒频移和相位差原理的LDV(LaserDopplerVelocimeter)技术研究了溶胶-电雾化系统中荷电雾滴的轴向速度及其分布,并分析了雾滴在输运过程中的受力情况。结果表明,在电场力、重力、流体拖曳力等共同作用下,雾滴轴向速度在垂直于雾场轴线的平面内沿远离轴线的方向逐渐降低,但各点速度分布的标准偏差趋于减小;随着轴向距离的增加,雾滴速度明显增大,在距喷头5cm处高达1 2m/s,并沿径向分布趋于一致。这些结果为溶胶 电雾化系统中薄膜沉积过程的理论研究提供了实验依据。
A laser Doppler velocimeter(LDV)was used to measure the droplets'axial velocity and its distribution induced by electrostatic spray and the forces acting on the droplets in their transportation are analyzed. The results show that under the effects of the electric field force F_e,gravity and fluid dragging force etc.,the droplets exhibit higher axial velocity and more uniformly velocity distribution in radial direction with the increase of the transported distance. It was also found that outer droplets move slower but exhibit more narrow velocity distribution than inner ones. These experimental results are valuable for numerical analysis on interactions between droplets and substrate during PZT film preparation in electrostatic spray deposition (ESD) system.
出处
《微细加工技术》
2004年第3期24-28,共5页
Microfabrication Technology
基金
中国科学院博士点基金资助项目(20030358018)
