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金刚石线锯切割氮化硅的实验研究 被引量:3

Slicing Si_3N_4 with fixed abrasive diamond wire saw
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摘要 采用往复式金刚石线锯对氮化硅进行了切割工艺实验研究,分析了线锯切割速度、进给速度和张紧压力对氮化硅表面粗糙度的影响,对试样表面进给方向和切割线方向的表面粗糙度变化趋势均进行了考察。结果显示:磨粒切削深度随线速度增大而减小,随进给速度和张紧压力的增大而增大。获得的较优的工艺参数为切割线速度1.5 m/s,进给速度0.08 mm/min,张紧压力0.18 MPa,探讨了线锯的磨损形式以及线锯磨损对试样加工表面粗糙度的影响。 The machining of Si 3 N 4 by fixed diamond wire saw was investigated. The effects of wire speed,feed speed and tension pressure on the surface roughness were analyzed. Surface roughness in cutting direction and feed direction were both detected. Results showed that the cutting depth of grits decreased with the increase of cutting speed and increased with the increase of infeed speed and tension pressure. The optimized cutting parameters are wire speed 1. 5 m / s,feed speed 0. 08 mm / min and tension pressure 0. 18 MPa. The main wear form of fixed diamond wear saw was discussed. The effect of wear on the surface roughness was also investigated.
出处 《金刚石与磨料磨具工程》 CAS 2013年第5期5-11,共7页 Diamond & Abrasives Engineering
基金 江苏省自然科学基金面上项目(No.BK2012796) 南京航空航天大学引进人才科研启动项目(No.1005-56YAH) 江苏省高校优势学科建设工程资助
关键词 金刚石线锯 氮化硅 表面粗糙度 diamond wire saw Si3N4 surface roughness
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参考文献7

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