期刊文献+

一种振动轮式微机械陀螺仪的特性研究 被引量:2

Performance Research of a Vibratory Wheel Micromechanical Gyroscope
在线阅读 下载PDF
导出
摘要 微机械惯性仪表具有成本低、可靠性高、体积小、重量轻等优点,国际上已有许多报导[1]-[5]。我们研制了一种振动轮式微机械陀螺仪[6]。本文主要针对这种微机械陀螺仪的特性进行研究:设计和研究了陀螺的检测系统、检测轴固有频率补偿回路,推导出了此类陀螺检测输入角速度的灵敏度、开环和闭环传递函数、交流反馈控制提取同相分量和抑制正交分量的原理,以及闭环控制改善动态测量频带的方法。本文的最后给出了该陀螺原理样机的初步试验结果。 Micromechanical inertial instruments have great advantages of low ost,high reliability,small size,lightweight,etc.There are many references discussed about this topic in the world .We have designed a vibratory wheel rate gyro .The studies carried out in this paper are mainly on the performance of this gyroscope.The detecting system of this gyro and the compensating circuits of the detected axis's inherent frequency are designed and studied.The sensitivity,open loop and close loop transfer functions in detecting the input angular rate are derived.The theory of AC feedback control for extracting the inphase component and the orthogonal component from original signal is presented,the method of using close loop control to improve the dynamic measurement bandwidth is given,and at the end of this paper,the primary experiment results of the prototype are shown.
机构地区 清华大学
出处 《中国惯性技术学报》 EI CSCD 1999年第2期39-45,共7页 Journal of Chinese Inertial Technology
关键词 微机械陀螺仪 振动轮式速率陀螺 空间角速度传感器 静电力再平衡回路 micromechanical gyroscope vibratory wheel rate gyro space angular rate sensor electrostatic force rebalance loop
  • 相关文献

同被引文献14

  • 1凌林本,李滋刚,周百令,熊正南.硅微机械陀螺传感器信号的检测方法[J].中国惯性技术学报,1999,7(4):62-65. 被引量:5
  • 2唐海林,程永生,苏伟.微机械梳状陀螺仪的瞬态分析[J].信息与电子工程,2004,2(2):118-120. 被引量:10
  • 3康新,董萼良,裘安萍,何小元.振动式微机械陀螺动态特性光学测试[J].光学学报,2006,26(2):202-206. 被引量:5
  • 4[2]Vladislav A Apostolyuk,V J Logeeswaran,Francis E H Tay.Efficient Design of Micromechanical gyroscopes[J].Journal of Micro -mechanics and Microengineering,2002,12(7):948-954.
  • 5[3]William Albert Clark.Micromachined Vibratory Rate Gyroscopes[D].University Of California.Berkeley,1997.
  • 6[4]Jonathan J Bernstein,Medfield,Mass,et al.Comb Drive Micromechanical Tuning Fork Gyro[P].US Patent:5349855,1994-09-27.
  • 7Kubena R L, Vickers-Kirby D J, Joyce R J. A new tunneling -based sensor for inertial rotation rate measurements [J]. Journal of Microelectro-mechanical Systems, 1999,8(4) :439-447.
  • 8Geiger W, Butt W U, Gaisser A, et al. Decoupled microgyros and the design principle DAVED [J]. Sensors and Actuators,2002,95(2-3) :239-249.
  • 9Chen Y. A novel tuning fork gyroscope with high Q- factors working at atmospheric pressure [J]. Mirosystem Technologies, 2005,11 ( 2-3 ): 111-116.
  • 10Acar C, Andrei M S. Structurally decoupted micromachined gyroscope with post-release capacitance enhancement[J]. J. Micromech. Microeng,2005(15) : 1092-1101.

引证文献2

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部