摘要
在影响超精密加工工件面形精度的诸多因素中,机床的空间几何误差与运动误差往往占主要作用.在本单位一台新型超精密加工试验台的加工试验中,出现了较大的面形误差.为了辨识影响工件面形精度的主要误差,首先将机器人运动学理论与多体系统运动学理论相结合,建立新型超精密加工试验台的实际运动模型;其次,定量分析各个误差,如对刀误差、两轴不平行度误差和摆动中心定位误差等对工件面形精度的影响,得到工件面形精度(波峰-波谷值)随不同误差的变化规律;最后进行加工试验,并用PG I1240轮廓仪检测工件面形,将实际加工工件的检测结果与各个误差的分析结果进行相关性分析.通过上述分析,确定试验台两轴不平行是影响工件面形精度的主要误差因素.
Among the factors that affect the workpiece form accuracy,space geometry errors and kinematic errors usually play the main part.Form error has been found in the workpiece that was machined on a new ultra-precision lathe.Therefore,the main factor affecting the form accuracy is expected to be identified.First,kinematics model of the lathe was established based on the robot kinematics theory and multi-body kinematics theory.Second,effect of several error factors,such as tool presetting error,non-parallelism error of the two spindles and positioning error of the oscillation center,on form accuracy of the workpiece was quantitatively analyzed.The variation of form accuracy(P-V value) with different errors was obtained through theoretical approach.Finally,experiments were carried out on the ultra-precision lathe to validate the analysis results.The machined surface of workpiece was measured with form talysurf PCI1240 and correlation analysis was conducted between measured data and emulated data.The results show that the non-parallelism of the two spindles on ultra-precision lathe is the main factor that accounts for the workpiece form error.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2009年第5期469-474,共6页
Nanotechnology and Precision Engineering
关键词
超精密机床
面形精度
运动模型
空间几何误差
相关性分析
ultra-precision machine
form accuracy
kinematics model
space geometry error
correlation analysis
