摘要
La3Ga5SiO14 thin films were grown on Si(100) substrates by pulsed laser deposition at several oxygen pressures(5,10,and 20 Pa).The effects of oxygen pressure on the structural and morphological characteristics of the films were investigated using X-ray diffraction,atomic force microscopy,and scanning electron microscopy.X-ray diffraction results showed the intensity of lines from crystallites oriented along the(300) and(220) planes increased as the oxygen pressure was increased to 20 Pa.The deposited films ...
La3Ga5SiO14 thin films were grown on Si(100) substrates by pulsed laser deposition at several oxygen pressures(5,10,and 20 Pa).The effects of oxygen pressure on the structural and morphological characteristics of the films were investigated using X-ray diffraction,atomic force microscopy,and scanning electron microscopy.X-ray diffraction results showed the intensity of lines from crystallites oriented along the(300) and(220) planes increased as the oxygen pressure was increased to 20 Pa.The deposited films ...
基金
supported by the opening project of the MOE Key Laboratory of Mechanical Manufacture and Automation of Zhejiang University of Technology (AMT200506-005)
