摘要
文中利用非平衡磁控溅射技术在Ti6Al4V合金表面沉积TiN薄膜。固定冲击频率、改变冲击载荷,在小载荷冲击磨损试验机上进行了系列周次的冲击磨损试验,用台阶仪、扫描电子显微镜、X射线衍射仪分析磨痕深度、形貌及相结构,并探讨了TiN薄膜的磨损机理。试验表明:TiN薄膜的冲击磨损机理主要为塑性变形和疲劳剥落,与基体材料作比较,TiN薄膜破坏的临界冲击周次比基体材料Ti6Al4V合金明显提高。
TiN films were grown by unbalanced magnetron sputtering on Ti6Al4V. The impact wear tests of TiN films were carried out with a small load impact-wear testing machine by fixed-frequency and different impact-force. The depth, morphologies and phase structure of worn surface were characterized with surface profilometer, scanning electron microscope(SEM), X-ray diffraction (XRD), and the wear mechanism of the TiN films was discussed in detail. The results indicate the wear mechanism of the TiN films were plasti...
出处
《中国表面工程》
EI
CAS
CSCD
北大核心
2010年第4期7-10,14,共5页
China Surface Engineering
基金
国家自然科学创新研究群体科学基金资助(50821063)
国家973计划(2007CB714704)
