摘要
在近似计算的基础上,对圆柱形真空镀膜室内偏压电场分布进行模拟,描绘了阴极电弧源粒子的蒸发和运动形态,设计了对称的粒子接收屏,讨论了不同带电粒子的相对接收比例,揭示了成分离析效应的影响因素·
Based on a rational approximation, the bias-voltage electric field in cylinder-like vacuum chamber is simulated and the evaporation of metal atoms and the movement characteristics of electrical particles during plating are depicted. Some various symmetrical cylinder-like lateral surfaces for receiving the particle coming from cathodic target have been designed. The changes of compositions of alloy (different particles) at the receiving surface with different target of various compositions under some deposition processes are discussed. The factors that influence the composition segregation effect are revealed.
关键词
阴极电弧离子镀
离子沉积
计算机模拟
cathodic arc ion plating
ion deposition
computer simulation
作者简介
张钧(1966-),男,辽宁锦州人,沈阳大学教授,博士.
