摘要
报道了采用溶胶 -凝胶技术 ,结合碱 /酸两步催化和氨与水蒸气混合气体热处理技术 ,成功地制备了高孔隙率、耐磨和附着力好的纳米多孔SiO2 薄膜 .使用透射电镜 (TEM )、扫描电镜 (SEM)、原子力显微镜、椭偏仪等方法测量和分析了薄膜的特性 .实验结果表明 :通过控制实验条件实现了SiO2 纳米结构的人工控制 ,形成的薄膜折射率在 1.18～1.4 1之间连续可调 ;采用碱 /酸两步催化法明显提高了薄膜的力学性能 ,混合气体中的热处理进一步改善了薄膜的力学性能 ;薄膜增强归因于SiO2
In this paper,a novel method to control structures which improve mechanic properties of nano porous SiO 2 films with high porosity is reported using a two-step catalytic sol-gel process along with posttreatments in a mixed atmosphere.The film is characterized by transmission electron microscope (TEM),scanning electron microscope (SEM),ellipsometery,and the abrasion test,respectively.The experimental results have shown that nano porous structures of the films can be controlled artificially and refractive index of the films can be adjusted from 1.18 to 1.41 rapidly and continuously by employing the base/acid two-step catalytic processes.The abrasion and adhesion tests present that the two-step catalysis improves the ability of the scratch-resistance and adhesion obviously,and the mixed gas treatment further strengthens the silica network.The increase in strength is attributed to more Si—O—Si bond cross-linkages between silica particles formed by the two-step catalysis and the mixed gas treatment.
出处
《同济大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2004年第6期836-840,共5页
Journal of Tongji University:Natural Science
基金
国家自然科学基金重点资助项目 ( 2 0 13 3 0 40 )
国家"八六三"高技术研究发展计划资助项目 ( 2 0 0 2AA842 0 5 2 )
上海市重点学科建设基金资助项目
上海市自然科学基金资助项目 ( 0 2ZE14 10 1)
上海市纳米技术与产业发展促进中心资助项目( 0 3 5 2nm0 43
