摘要
考虑和分析了螺线管微电感的几何结构参数对微电感性能的影响,利用MEMS技术制作了四种不同几何结构的高性能射频螺线管微电感。这些微电感采用铜线圈,以减小线圈寄生电阻,且制作工艺简单,成本低,与IC相兼容。测试结果表明,微电感在较宽的工作频率范围内具有较高的Q值,在频率分别为6 GHz,4.4 GHz,5.8 GHz和5.6 GHz,微电感Q峰值为38,19.1,24.1和21.9,所对应的电感量为1.81 nH,1.07 nH,1.03 nH和1.17 nH。
Effects of the geometrical parameters on the performance of solenoid inductor were analyzed and the high-performance RF solenoid microinductors with four different geometrical parameters were fabricated using microelectromechanical systems (MEMS) technology. In these inductors, the electroplated copper coils are employed to reduce the series resistance. The fabrication process is simple, low cost and compatible with IC technology. The measurement results show that these inductors have high Q-factor in the wide range of operating frequency. The peak-Q of these inductors are 38, 19.1, 24.1 and 21.9 (6 GHz, 4.4 GHz, 5.8 GHz, 5.6 GHz) and the corresponding inductance are 1.81 nH, 1.07 nH, 1.03 nH and 1.17 nH at each peak-Q frequency, respectively.
出处
《微细加工技术》
EI
2006年第5期36-40,共5页
Microfabrication Technology
基金
教育部科学技术研究重大项目资助(0307)
上海-应用材料研究与发展基金资助项目(0515)
作者简介
方东明(1977-),男,安徽枞阳人,博士研究生,目前从事射频微机电系统研究.
