摘要
为了测试微观条件下材料表面的摩擦学性能,给出了一种微摩擦力的光学测试方法。基于MEMS工艺制作了硅微力传感器,通过标定的方法得到了微力与传感器的变形量之间的关系,采用光反射的方法测量了试验过程中传感器的变形量,进而通过数据处理得到微摩擦力。简要介绍了微摩擦力的光学测试原理,给出了硅微力传感器的结构及制作过程,并对铜和铝的表面进行了微摩擦力测量。初步试验结果表明,该方法具有测试精度高、重复性好、系统性能稳定的优点,能满足微机电系统中摩擦力测试的需要。
An optical testing method of micro-friction and its principle was introduced to characterize the friction properties of material surface under microcosmic conditions. The micro-force sensor of Si slice was firstly fabricated by MEMS technique, and then the relationship between micro-force and deformation of sensor was obtained by demarcation and the deformation of sensor was tested by light reflecting in the process of experiments. Finally, the micro-friction force was obtained by the data process. Simultaneously the manufacture process and the structure of sensor were illustrated. After the micro-friction on the surfaces of Cu and Al were measured, the results shows that the method has high precision, good repetition and stability, and it can meet the demands of micro-friction testing in MEMS.
出处
《微细加工技术》
EI
2007年第2期9-12,共4页
Microfabrication Technology
作者简介
刘治华(1971-),男,河北栾城人,讲师,工学博士,研究方向为微光机电集成系统.
