摘要
阐述了用内标法在扫描电子显微镜上测定固体颗粒直径的方法﹑实验﹑计算方法和测量不确定度评估。并通过对测量不确定度评估的讨论,认为用内标法在扫描电子显微镜上测量微小物质长度是一种操作方便,可以获得较小的测量不确定度的方法。
Solid particle diameter was measured in SEM with an internal standard method. The method of experiment, calculation and measurement uncertainty evaluation were also described. Through discussing the evaluation result, the internal standard method is easy to measure the length of micromatter and small to measurement uncertainty.
出处
《红外与激光工程》
EI
CSCD
北大核心
2008年第S1期203-206,共4页
Infrared and Laser Engineering
