摘要
利用白光作光源的干涉仪[WLI]克服了单色相干光干涉相位不确定的缺点,能够进行绝对测量。同时,白光光源的稳定性和低廉的价格也是此项技术的优势,因此白光干涉测量法在近十几年得到了很大的发展。本文提出了用白光干涉原理测量金属箔厚度的方法,经分析,测量的理论误差<6nm,开辟了白光干涉法测量非透明物体厚度的新思路。
White light interferometers (WLI),overcoming the disadvantage of the phase ambiguity in the narrow-
band interferometry,allows in principle absolute position determination. White light resource also has the advan-
tages of stability and low price. So,rapid progress has been made on WLI in the last ten years. In this paper we
bring forward the method of foil thickness measurement with WLI technic. The theoretic error can be reduced to
less than 6nm. It offers a new method of measuring the thickness of opaque object.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2003年第z2期19-20,24,共3页
Chinese Journal of Scientific Instrument
关键词
白光干涉
无损检测
干涉谱
White light interferometers
Touchless measurement
Interference spectrum
