摘要
扭转谐振模态微悬臂梁低能耗、高品质因数的特性,使它比传统的弯曲模态悬臂梁拥有更高的灵敏度和分辨率.将微传感器加工技术和生物检测技术相结合,利用扭转谐振模态微悬臂梁传感器对生物素和亲和素的特异性反应进行检测,结果传感器的灵敏度为0.9pg/Hz,分辨可达到49fg.本文还着重介绍了为谐振梁传感器设计的以锁相环(Phase-Locked Loop简称PLL)为核心的闭环接口电路,分析了悬臂梁和电路在闭环系统中的工作特性,并探讨了解决谐振式传感器在使用中常见的稳定性差、噪声干扰强等问题的方法.:
Due to its advantages such as low energy consumption and high quality factor , microcantilever beam of torsional resonance mode demonstrates markedly higher sensitivity and resolution compared with conventional microcantilever beam of bending resonance mode. Combining micro-machining and bio-detecting technique, the measurements, via detecting the specific reaction with avidin and biotin by the resonator, and the sensitivity and resolution of the sensors are 0.9 pg/Hz and 49 fg respectively. Additionally, focused on Phase-Locked Loop, this letter emphatically introduced closed-loop interface circuits designed for the resonator and analyzed the loading characteristics of as-prepared sensors and circuits functionalized as a closed-loop system. Finally, aiming at the familiar problems such as poor stability and strong noise-interference, a few methods were investigated.
出处
《传感技术学报》
CAS
CSCD
北大核心
2007年第10期2234-2238,共5页
Chinese Journal of Sensors and Actuators
基金
973项目资助(2006CB300405)
关键词
扭转谐振模态微悬臂梁
闭环接口电路
PLL
torsional resonant microcantilever beam
closed-loop interface circuits
PLL
作者简介
包涵菡(1982-),女,在读研究生,从事谐振式微传感器接口电路的研究. 李昕欣(1965-),男,中国科学院上海微系统与信息技术研究所研究员、博导,从事微纳传感器和微纳电子机械系统研究,xxli@mail.sim.ac.cn
