摘要
采用溶胶-凝胶法在印有梳状银电极的石英玻璃表面制备了不同含量锌离子掺杂的氧化钛薄膜,通过烧结制得一系列湿敏元件,研究了锌离子掺杂量、烧结温度和工作频率对薄膜湿敏性能的影响.研究结果发现,较低的工作频率下元件的湿度敏感性能较好.随着锌掺杂量的增加,湿敏性能降低,表现在湿度敏感点升高,阻抗随湿度的变化幅度减小.相同掺杂量下,随着烧结温度的升高,元件的湿敏性能呈现先改善后恶化的趋势.
The Zn2+-doped titania films were prepared on the quartz glass whose surface was printed with comb-like Ag electrode by the sol-gel method and then a series of humidity sensing assemblies were constructed. The effects of Zn2+ dopant, sintering temperature and working frequency on humidity sensing properties of films were studied. Experimental results show that, the assemblies working at lower frequency appear better humidity sensitivity. The sensing properties were decreased with the increase of Zn2+ additi...
出处
《电子器件》
CAS
2007年第6期1995-1997,共3页
Chinese Journal of Electron Devices
基金
国家自然科学基金项目资助(50562003)
