摘要
本文进行了宽幅一体钼靶材的烧结和轧制工艺试验,探讨了开坯轧制温度对靶材组织及性能的影响。结果表明:轧制温度过低造成靶材组织不均匀,内部缺陷较多;轧制温度过高容易引起靶材晶粒粗大。选择适宜的轧制温度,采取多火多道次工艺轧制,并在适当温度退火后,能够得到晶粒尺寸小于100μm的细小均匀组织。
The experiments of sintering and rolling about broad width molybdenum plate target have been carried out.The influences of rolling temperature on the microstructure and properties of large-sized molybdenum plate target have been investigated.The results showed that lower rolling temperatures caused more internal defects and uneven grain structure within broad width molybdenum targets,and higher rolling temperatures caused coarse microscopic grain of molybdenum targets.Selecting an appropriate rolling temperature,multi heat multi-pass hot rolling,and annealing at a suitable temperature,can obtain a fine uniform structure with a grain size of less than 100μm.
作者
单玉郎
方宏
孙虎民
张雪凤
Shan Yu-lang;Fang Hong;Sun Hu-min;Zhang Xue-feng(Luoyang sifon Electronic Material Co.,LTD,Luoyang 471003,China)
出处
《功能材料与器件学报》
CAS
2019年第4期253-256,共4页
Journal of Functional Materials and Devices
关键词
钼靶材
轧制温度
晶粒尺寸
Molybdenum target
rolling temperature
grain size
作者简介
单玉郎(1990-),女,硕士,技术员,主要研究方向为高纯金属溅射靶材.(E-mail:shanyulang1990@163.com).
