摘要
特征长度位于纳米至微米级尺度的三维(3D)微结构具有丰富而独特的性质与功能,成为了下一代微纳器件的重要组成部分。本文实现了通过应力工程将具有百纳米级厚度的纳米晶金刚石纳米薄膜卷曲构筑成微管、微环、微锯齿条带以及微弹簧等复杂三维微结构,观测到乙醇表面张力诱导金刚石纳米薄膜脱附衬底的现象。并且,本文研究了金刚石自卷曲微管的回音壁模式光谱特性及色心的腔耦合增强特性,通过精细结构设计实现了高阶谐振模式的有效调控。
Three-dimensional(3 D)microstructures with feature lengths from nanometer to micrometer scale exhibit various and unique properties and functions,and have been becoming key building blocks for the next-generation devices.In this work,nanocrystalline diamond nanomembranes with 100 nanometers were constructed into complex 3 D microstructures via stress engineering,including micro-tubes,micro-rings,micro-jagged ribbons and micro-helix.The detachment of diamond nanomembranes from the substrate induced by surface tension of ethanol is observed.Furthermore,the WGM spectral characteristic and enhanced color center photoluminescence of diamond tubular microcavity was investigated,and the effective regulation of high order resonance mode was realized through fine structure design.
作者
武楷博
田子傲
梅永丰
WU Kai-bo;TIAN Zi-ao;MEI Yong-feng(Department of Materials Science,Fudan University,Shanghai 200433,China;International Institute of Intelligent Nanorobots and Nanosystems,Fudan University,Shanghai 200438,China;State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;Institute of Optoelectronics,Fudan University,Shanghai 200438,China;Yiwu Research Institute,Fudan University,Zhejiang 322000,China)
出处
《功能材料与器件学报》
CAS
2022年第4期395-400,共6页
Journal of Functional Materials and Devices
基金
国家自然科学基金(61975035,51961145108)
上海科学技术委员会(21142200200,20501130700)
国家重点研发计划(2021YFE191800)
作者简介
武楷博(1997-),男,硕士研究生,主要研究方向为薄膜材料与光学微腔,E-mail:kaibowu19@fudan.edu.cn;通信作者:田子傲(1986-),男,博士,研究员,主要研究方向为低维材料生长与应用,E-mail:zatian@mail.sim.ac.cn
