摘要
Narrowband photodetection is an important measurement technique for material analysis and sensing,for example,nondispersive infrared sensing technique.Both photoactive material engineering and nanophotonic filtering schemes have been explored to realize wavelength-selective photodetection,while most devices have a responsive bandwidth larger than 2%of the operating wavelength,limiting sensing performance.Near-infrared photodetection with a bandwidth of less than 0.2%of the operating wavelength was demonstrated experimentally in Au/Si Schottky nanojunctions.A minimum linewidth of photoelectric response down to 2.6 nm was obtained at a wavelength of 1550 nm by carefully tailing the absorptive and radiative loss in the nanostructures.Multiple functions were achieved on chip with the corrugated Au film,including narrowband resonance,light harvesting for sensing and photodetection,and electrodes for hot electron emission.Benefiting from such a unity integration with in situ photoelectric conversion of the optical sensing signal and the ultranarrowband resonance,self-contained on-chip biosensing via simple intensity interrogation was demonstrated with a limit of detection down to 0.0047%in concentration for glucose solution and 150 ng∕m L for rabbit IgG.Promising potential of this technique is expected for the applications in on-site sensing,spectroscopy,spectral imaging,etc.
基金
financial support from the National Natural Science Foundation of China(Grant Nos.62220106001 and 92050108)
the Key Research and Development Program of Guangdong Province(Grant No.2023B0101200009)
the Guangdong Science and Technology Program International Cooperation Program(Grant No.2021A0505030038)
the Guangdong Basic and Applied Basic Research Foundation(Grant No.2022B1515020069)
the Pearl River Talent Plan Program of Guangdong(Grant No.2019QN01X120)
the technical support from Nano Fabrication Facility and Nano-X of SINANO,CAS
作者简介
Corresponding author:Long Wen,longwen@jnu.edu.cn,is a professor at the Institute of Nanophotonics at Jinan University.His research interests center on the applications of plasmonics to infrared light detection,modulation,biosensing,and multifunctional nanodevices.Currently,he is particularly interested in the integration of nanophotonics with various applications-specific platforms,such as CMOS image sensor,semiconductor devices,and microfluidics for developing more compact optoelectronic devices and systems;Corresponding author:Qin Chen,chenqin2018@jnu.edu.cn,is a professor at the Institute of Nanophotonics,Jinan University,China.He directs a micro/nano-optoelectronic device group.His research interests include nanophotonics,photodetection,optical sensing,micro-spectroscopy,etc.He has developed sub-ppm MIS junction hydrogen sensors,infrared enhanced CMOS image sensor,on-chip spectral sensor,etc.He received his PhD in microelectronics and solid sold electronics from the Institute of Semiconductors,Chinese Academy of Sciences,in 2006;Xianghong Nan,contributed equally to this work;Wenduo Lai,contributed equally to this work;Dan Gao,is an associate professor in Tsinghua International Graduate School at Shenzhen,Tsinghua University.Her research focuses on the development of novel methods based on microfluidics combined with mass spectrometry and spectroscopic techniques for drug analysis,novel organic synthesis and biosensors.She received her PhD from Beijing University of Chemical Technology,China
