摘要
基于微米球刻蚀技术设计了一种制备多量子阱红外探测器(QWIP)表面二维光栅的新型工艺,通过改变微米球的直径可以为不同探测波长的QWIP制备表面二维光栅,有效降低了制备成本和技术难度。采用GaAs衬底作为实验片制作光栅、聚苯乙烯(PS)材质小球作为表面掩膜,对小球的单层排布、PS小球刻蚀和光栅的刻蚀等工艺进行了深入的实验研究,并得出了最优的工艺参数。制备出了具有良好均匀性和一致性的二维光栅结构。通过傅里叶光谱仪测得表面光栅的耦合波长为6~9μm。最后研究了不同工艺条件对耦合结果的影响,证实当光栅直径为PS球直径的0.74倍时获得的耦合效果最优。
A novel process for preparing a two-dimensional grating on the surface of a multi-quantum well infrared photodetector(QWIP)was designed based on microsphere etching technology.The surface two-dimensional grating can be prepared for the QWIPs with different detection wavelengths by changing the diameters of the microspheres,which effectively reduces the preparation cost and technical difficulty.A GaAs substrate was used as an experimental wafer for fabricating grating,and a surface mask was made of small spheres of polystyrene(PS)material.The single layer arrangement of the small spheres,the PS small sphere etching and the etching of the grating were further studied by the experiment,and the optimal process parameters were obtained.A two-dimensional grating structure with good uniformity and consistency was prepared.The measuring result of Fourier spectrometer shows that the coupling wavelength of the surface grating is 6-9μm.Finally,the influences of different process conditions on the coupling results were researched.It is confirmed that the obtained coupling effect is optimal when the grating diameter is 0.74 times the diameter of the PS small sphere.
作者
孙伟业
邓军
何磊磊
杜欣钊
Sun WeiYe;Deng Jun;He LeiLei;Du XinZhao(Key Laboratory of Optoelectronics Technology of Ministry of Education,Faculty of Information Technology,Beijing University of Technology,Beijing100124,China)
出处
《微纳电子技术》
北大核心
2020年第1期66-72,共7页
Micronanoelectronic Technology
基金
北京市自然科学基金资助项目(4182011)
19科技创新服务能力建设(市级)资助项目(040000546319536)
北京工业大学第十七届研究生科技基金资助项目(ykj-2018-00429).
作者简介
孙伟业(1993—),男,河北沧州人,硕士研究生,主要从事多量子阱红外探测器表面光栅制备的研究,E-mail:794982825@qq.com;邓军(1969—),男,北京人,博士,副研究员,硕士生导师,主要在半导体光电子器件领域从事光电探测器件与材料外延制备的科研工作。
