摘要
柔性混合电路(FHC)作为一种兼具信号处理能力和柔韧性的新型电路,广泛应用于监测人体生理信号的可穿戴设备,然而刚性电子芯片和柔性印刷电路的连接点处应力集中的问题严重降低了其电气可靠性。利用底部填充对柔性混合电路的连接点进行结构补强,系统性地研究了底部填充对柔性混合电路可靠性的影响。在电气测试过程中发现,与未进行补强的电路相比,底部填充补强的柔性混合电路不仅可承受的弯曲曲率半径减小了74.80%,而且在1000次循环弯曲下连接点的接触电阻最大变化仅0.89%。利用该技术,制作出用于无线监测温度和相对湿度信号的智能口罩。该口罩在折叠和展开过程中依然可以无线传输信号,且测得相对温度变化率仅为1.65%,相对湿度变化率仅为3.12%,证明了底部填充补强的柔性混合电路可以应用到可穿戴设备,在弯曲形变下依然可以保持信号的稳定性。
As a new type of circuit with signal processing ability and flexibility,flexible hybrid circuits(FHCs)are widely used in wearable devices for monitoring human physiological signals.However,the electrical reliability of the flexible hybrid circuit is severely reduced by stress concentration at the connection point of rigid electronic chip and flexible printed circuit.Underfill was added to strengthen the connect point of the flexible hybrid circuit,and the influence of underfill on the reliability of the flexible hybrid circuit was systematically studied.During the electrical test,it is found that compared with the unreinforced circuit,the radius of bending curvature that the underfill reinforced flexible hybrid circuit can withstand is reduced by 74.80%.Moreover,the maximum change of contact resistance at the connection point is only 0.89%under 1000 cycles of bending.Using the technology,a smart mask for wireless monitoring temperature and relative humidity signals was fabricated.The smart mask can still transmit signals wirelessly during folding and unfolding.The measured relative temperature change rate is only 1.65%,and the relative humidity change rate is only 3.12%,which proves that underfill reinforced flexible hybrid circuits can be applied to wearable devices and still maintain the stability of the sensing signal under bending.
作者
李浩然
孙鹏
刘伟涛
项晓禹
张弛
刘军山
Li Haoran;Sun Peng;Liu Weitao;Xiang Xiaoyu;Zhang Chi;Liu Junshan(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China)
出处
《微纳电子技术》
CAS
北大核心
2023年第8期1295-1300,共6页
Micronanoelectronic Technology
基金
国家自然科学基金(51875083)
国家重点研发计划项目(2020YFB2008502)
作者简介
通信作者:刘军山(1975—),男,辽宁庄河人,博士,研究员,博士生导师,主要研究方向为柔性电子、微流控技术、微纳米制造技术;李浩然(1998—),男,河南焦作人,硕士研究生,主要研究方向为柔性电子、微纳制造技术