摘要
薄膜的表面粗糙度直接影响薄膜的最终性能。本文构建了薄膜的三维生长动力学模型,并采用蒙特卡罗方法实现了薄膜生长的数值模拟,得到了沉积速率、基底温度和原子覆盖度等因素对薄膜表面粗糙度的影响。模拟结果表明:随着沉积速率的增大、基底温度的降低和覆盖度的增大,薄膜的表面粗糙度增大;并且在沉积速率较小时,薄膜的表面粗糙度随沉积速率增加迅速,而沉积速率较大时,薄膜的表面粗糙度随沉积速率增加缓慢。
The performance of thin film is influenced by the surface roughness of thin film.A three dimensional model to describe the growth of thin film is proposed,and the surface roughness of thin film is simulated by using Monte Carlo method.The effects of the deposition rate,the substrate temperature and the coverage on the surface roughness of thin film have been studied in details in this paper.The simulation results show that with the deposition rate increasing,the substrate temperature decreasing and the coverage increasing,the surface roughness of thin film increases.When the deposition rate is lower,the increasing rate of the surface roughness is larger,and when the deposition rate is higher,the increasing rate of the surface roughness is smaller.
作者
贾莹
张怡南
姜昊辰
鲁韶菲
陈瀛
邹斌
Jia Ying;Zhang Yinan;Jiang Haochen;Lu Shaofei;Chen Ying;Zou Bin(College of Science,Mizu University of China,Beijing 100081,China)
出处
《科技通报》
2020年第1期21-25,共5页
Bulletin of Science and Technology
基金
国家自然科学基金青年项目(项目号11604394)
北京市基础教育阶段创新人才培养项目委托项目(项目号2017QTLX10)
中央民族大学青年基金(项目号2019QNPY72)
大学生创新创业训练计划项目(项目号URTP2019110054,GCCX2019110026)
作者简介
贾莹(1980-),女,河南省新郑人,博士研究生,副教授,研究方向为纳米功能材料的数值模拟。E-mail:jiaying317@muc.edu.cn。
