摘要
X射线成像被广泛应用于医疗健康、工业探伤等领域。相比传统依赖化学显影的照相方式,基于CMOS工艺的X射线图像传感器具有实时输出、便捷性强、成本低、图像质量高等优势,正逐渐成为此领域发展的主流方向。本文将从CMOS X射线图像传感器的检测原理与基本架构出发,介绍其材料优化、像素电路、阵列系统等方面的最新进展,并总结近20年间X射线图像传感器在像素数量、电路架构和工艺等维度的发展和演进趋势。
X-ray imaging has been widely used for health care and flaw detection applications.Compared to traditional X-ray photography that relies on chemical processes,X-ray imaging based on CMOS processes has become the mainstream research topic of this field due to its in-vivo response,high convenience,low cost,and high image quality.This paper will introduce the basic sensing principle and system architecture of CMOS X-ray image sensors.It will also cover the recent advances in sensing material,pixel-level circuit design,and readout arrays.Finally,the paper will summarize the achievements and evolutionary trends of CMOS X-ray image sensors regarding the number of pixels,circuit architecture,and process nodes in the last 20 years.
作者
杨京澳
张晓龙
彭家丽
潘思宁
任天令
YANG Jing’ao;ZHANG Xiaolong;PENG Jiali;PAN Sining;REN Tianling(School of Integrated Circuits,Tsinghua University,Beijing 100084,China)
出处
《微纳电子与智能制造》
2023年第3期41-52,共12页
Micro/nano Electronics and Intelligent Manufacturing
基金
国家重点研发计划(2022YFB3204100)
国家自然科学基金(U20A20168)项目资助
作者简介
杨京澳,硕士,主要研究方向为CMOS图像传感器。E-mail:yja22@mails.tsinghua.edu.cn;通信作者:潘思宁,助理教授,主要研究方向为智能传感器电路、CMOS频率源,ΔΣ调制器等模拟/数模混合电路。E-mail:psn@tsinghua.edu.cn
