摘要
针对共焦拉曼系统空间分辨力提升的迫切需求,研制了一套径向偏振光瞳滤波共焦拉曼光谱显微系统(RPCRS)。该系统利用径向偏振光发生器(S波片)将激光器发出的线偏振光转换为径向偏振光;然后,利用光瞳滤波器对径向偏振光进行调制,从而压缩拉曼激发光斑;最后,利用共焦针孔消除焦点外位置的拉曼散射光,进一步提升共焦拉曼显微系统的空间分辨力。该系统具有较高的空间分辨力和横向灵敏度。以周期性刻线和标准台阶作为测试样品进行实验,实验结果表明,RPCRS的空间分辨力可以达到240 nm,横向灵敏度相比普通拉曼共焦系统提升了46.5%,测量标准不确定度为18.87 nm。该系统可用于高空间分辨共焦拉曼成像。
To improve the spatial resolution of confocal Raman system, a radial-polarized pupil-filter confocal Raman microscope system(RPCRS) is developed. The radial polarized light generator(S-plate) is used to convert the linearly polarized light from the laser into radially polarized light. Then, a pupil filter is utilized to modulate the radially polarized light to realize the compression of the Raman excited spot. Finally, the spatial resolution of confocal Raman microscope system is improved by a pinhole to eliminate the Raman scattering light outside the focus. This system has high spatial resolution and lateral sensitivity. The periodic scribes and the standard steps are used as samples. Experimental results show that the spatial resolution of RPCRS can reach 240 nm, the lateral sensitivity is 46.5% higher than that of common confocal Raman microscope system, and the uncertainty of transverse measurement standard is 18.87 nm. This system can realize high spatial resolution imaging of confocal Raman microscope system.
作者
李书成
邱丽荣
王允
赵维谦
Li Shucheng;Qiu Lirong;Wang Yun;Zhao Weiqian(Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2020年第2期63-69,共7页
Chinese Journal of Scientific Instrument
基金
国家重点研发计划课题(2018YFF01012001)
国家自然科学基金(51535002,61635003)项目资助.
关键词
径向偏振
光瞳滤波
共焦拉曼
空间分辨力
radial polarized
pupil filter
confocal Raman
spatial resolution
作者简介
李书成,2014年于北京理工大学获得学士学位,现为北京理工大学博士研究生,主要研究方向为光学测量仪器设计与研发。E-mail:scli_bit@163.com;通信作者:赵维谦,分别在1993年和2003年于哈尔滨工业大学获得硕士学位和博士学位,现为北京理工大学教授,主要研究方向为差动共焦理论和精密光学检测。E-mail:zwq669@126.com
