摘要
伴随当前航空、航天、大型科学仪器智能制造场景下多环节、多过程、多装备制造工艺与制造信息不断融合优化,正推动长度测量需求从传统局部、单参数、离线、分时测量快速转变为全局、多目标的在线、实时、同步测量,现有激光测距方法受到原理限制,在精度、实时性与并行能力等方面面临瓶颈。本文提出了一种基于飞行时间法的双飞秒激光多目标绝对距离测量系统,设计特定的光纤分束方案,使飞秒激光光源同时到达多个目标,并构造时域可区分特征匹配多组脉冲,携带距离信息的脉冲经强度互相关模块后进入FPGA数据处理单元,实现多路绝对距离的实时解算,并完成系统的集成化设计。实验表明系统在2 kHz的更新速度下阿伦偏差评定的测量精度优于10^(-5)m,与干涉仪对比的测距偏差小于4μm,在此基础上,搭建平行光路结构实现多自由度的同时测量,测量偏差优于5″。
With the continuous fusion and optimization of multi-link,multi-equipment manufacturing process and information in the current intelligent manufacturing scenarios of aviation,aerospace and large scientific instruments,the demand for distance measurement is being promoted from the traditional local,single-parameter,off-line and time-sharing to the global,multi-objective online,real-time and synchronous.The existing laser ranging methods are limited by principle and face bottlenecks in precision,real-time performance and parallel capability.This article develops a dual-femtosecond laser multi-target absolute distance measurement system based on the time-of-flight method.A specific fiber beam splitting scheme is designed to make femtosecond laser pulses reach multiple targets at the same time.Multiple sets of pulses with distinguished feature matching in the temporal domain are constructed.The pulses carrying distance information are transferred into the FPGA data processing unit after the intensity cross-correlation module,and the real-time multiple absolute distances and realizing the integrated design of the whole system are calculated.Finally,the system for verification and the experiment results show that the ranging accuracy of the system is better than 4μm and the allen deviation is better than 10^(-5)m at the updating speed of 2 kHz.On this basis,the parallel optical path structure is established to realize the simultaneous measurement of multiple degrees of freedom,and the measurement deviation is better than 5″.
作者
胡新源
杨凌辉
宋有建
杨朔
韩森淼
Hu Xinyuan;Yang Linghui;Song Youjian;Yang Shuo;Han Senmiao(College of Precision Instrument and Opto-Electronics Engineering,Tianjin University,Tianjin 300072,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2023年第8期74-81,共8页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金国家重大科研仪器研制项目(52127810)资助
关键词
飞秒激光
多目标测量
绝对距离
FPGA
系统集成
femtosecond laser
multi-target measurement
absolute distance
field programmable gate array
system integration
作者简介
胡新源,2021年于天津大学精密仪器与光电子工程学院获得学士学位,现为天津大学硕士研究生,主要研究方向为激光及光电测试技术。E-mail:huxy@tju.edu.cn;通信作者:杨凌辉,2010年于天津大学获得博士学位,现为天津大学精密仪器与光电子工程学院副教授。主要研究方向为激光与光电测试、大尺寸精密测量技术。E-mail:icelinker@tju.edu.cn
