A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage d...A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.展开更多
We have studied the absorption, reflection, and transmission of electromagnetic waves in an unmagnetized uniform plasma layer covering a metal surface in atmosphere conditions. Instead of the absorption of the electro...We have studied the absorption, reflection, and transmission of electromagnetic waves in an unmagnetized uniform plasma layer covering a metal surface in atmosphere conditions. Instead of the absorption of the electromagnetic wave propagating only once in previous work on the plasma layer, a general formula of total power absorption by the plasma layer with an infinite time of reflections between the atmosphere-plasma interface and the metal surface has been derived for the first time. Effects of plasma parameters, especially the dependence of the fraction of positive ions, negative ions and electrons in plasmas on the power absorption processes are discussed. The results show that the existence of negative ions significantly reduces the power absorption of the electromagnetic wave. Absorptions of electromagnetic waves are calculated.展开更多
The characteristics of collisional radio-frequency (rf) sheath dynamics over an elec-trode with a cylindrical hole is simulated by means of a self-consistent model which consists of two-dimensional time-dependent flui...The characteristics of collisional radio-frequency (rf) sheath dynamics over an elec-trode with a cylindrical hole is simulated by means of a self-consistent model which consists of two-dimensional time-dependent fluid equations coupled with Poisson equation. In addition, an equivalent-circuit model is coupled to the fluid equations in order to self-consistently determine re-lationship between the instantaneous potential at the rf-biased electrode and the sheath thickness. Two-dimensional profiles of the potential, the ion fluid velocity, and the distributions of the ion and electron densities within the sheath are computed under various discharge conditions, such as the discharge powers and the gas pressures. The results show that the existence of the cylindrical hole on the electrode significantly affects the sheath structure and generates a potential trap in the horizontal direction, which is particularly strong when the sheath thickness is comparable to the depth of the hole. Moreover, it is found that the collisional effects have a significant influence on the sheath characteristics.展开更多
Acoustic breathing modes of dusty plasmas have been investigated in a cylindrical system with an axial symmetry. The linear wave solution and a 'dispersion' relation were derived. It was found that in an infin...Acoustic breathing modes of dusty plasmas have been investigated in a cylindrical system with an axial symmetry. The linear wave solution and a 'dispersion' relation were derived. It was found that in an infinite area, the mode is reduced to a 'classical' dust acoustic wave in the region away from the center. If the dusty plasma is confined in a finite region, however, the breathing (or heart-beating) behavior would be found as observed in many experiments.展开更多
基金National Natural Science Foundation of China(No.10635010)
文摘A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.
文摘We have studied the absorption, reflection, and transmission of electromagnetic waves in an unmagnetized uniform plasma layer covering a metal surface in atmosphere conditions. Instead of the absorption of the electromagnetic wave propagating only once in previous work on the plasma layer, a general formula of total power absorption by the plasma layer with an infinite time of reflections between the atmosphere-plasma interface and the metal surface has been derived for the first time. Effects of plasma parameters, especially the dependence of the fraction of positive ions, negative ions and electrons in plasmas on the power absorption processes are discussed. The results show that the existence of negative ions significantly reduces the power absorption of the electromagnetic wave. Absorptions of electromagnetic waves are calculated.
基金The project supported by the National Natural Science Foundation of China(No.19975008 and 10275009)and by MOEC (Ministry of Education,China)Grant for Cross-Century Excellent ScholarSupport from the Natural Sciences and Engineering Research Council of C
文摘The characteristics of collisional radio-frequency (rf) sheath dynamics over an elec-trode with a cylindrical hole is simulated by means of a self-consistent model which consists of two-dimensional time-dependent fluid equations coupled with Poisson equation. In addition, an equivalent-circuit model is coupled to the fluid equations in order to self-consistently determine re-lationship between the instantaneous potential at the rf-biased electrode and the sheath thickness. Two-dimensional profiles of the potential, the ion fluid velocity, and the distributions of the ion and electron densities within the sheath are computed under various discharge conditions, such as the discharge powers and the gas pressures. The results show that the existence of the cylindrical hole on the electrode significantly affects the sheath structure and generates a potential trap in the horizontal direction, which is particularly strong when the sheath thickness is comparable to the depth of the hole. Moreover, it is found that the collisional effects have a significant influence on the sheath characteristics.
基金The project supported by the National Nature Science Foundation of China(No.10175013)andInternational Collaboration Funds(No.10010760807,10160420799)
文摘Acoustic breathing modes of dusty plasmas have been investigated in a cylindrical system with an axial symmetry. The linear wave solution and a 'dispersion' relation were derived. It was found that in an infinite area, the mode is reduced to a 'classical' dust acoustic wave in the region away from the center. If the dusty plasma is confined in a finite region, however, the breathing (or heart-beating) behavior would be found as observed in many experiments.
