Flexible strain sensors play an important role in electronic skins,wearable medical devices,and advanced robots.Herein,a highly sensitive and fast response optical strain sensor with two evanescently coupled optical m...Flexible strain sensors play an important role in electronic skins,wearable medical devices,and advanced robots.Herein,a highly sensitive and fast response optical strain sensor with two evanescently coupled optical micro/nanofibers(MNFs)embedded in a polydimethylsiloxane(PDMS)film is proposed.The strain sensor exhibits a gauge factor as high as 64.5 for strain≤0.5%and a strain resolution of 0.0012%which corresponds to elongation of 120 nm on a 1 cm long device.As a proof-of-concept,highly sensitive fingertip pulse measurement is realized.The properties of fast temporal frequency response up to 30 kHz and a pressure sensitivity of 102 kPa^(−1) enable the sensor for sound detection.Such versatile sensor could be of great use in physiological signal monitoring,voice recognition and micro-displacement detection.展开更多
基金We are grateful for financial supports from the National Natural Science Foundation of China(No.61975173)the National Key Research and Development Program of China(No.SQ2019YFC170311)+3 种基金the Major Scientific Research Project of Zhejiang Lab(No.2019MC0AD01)the Key Research and Development Project of Zhejiang Province(No.2021C05003)the Quantum Joint Funds of the Natural Foundation of Shandong Province(No.ZR2020LLZ007)the CIE-Tencent Robotics X Rhino-Bird Focused Research Program(No.2020-01-006).
文摘Flexible strain sensors play an important role in electronic skins,wearable medical devices,and advanced robots.Herein,a highly sensitive and fast response optical strain sensor with two evanescently coupled optical micro/nanofibers(MNFs)embedded in a polydimethylsiloxane(PDMS)film is proposed.The strain sensor exhibits a gauge factor as high as 64.5 for strain≤0.5%and a strain resolution of 0.0012%which corresponds to elongation of 120 nm on a 1 cm long device.As a proof-of-concept,highly sensitive fingertip pulse measurement is realized.The properties of fast temporal frequency response up to 30 kHz and a pressure sensitivity of 102 kPa^(−1) enable the sensor for sound detection.Such versatile sensor could be of great use in physiological signal monitoring,voice recognition and micro-displacement detection.
