With the purpose of designing the extreme ultraviolet polarizer with many objectives,a combined application of multiobjective genetic algorithms is theoretically proposed.Owing to the multi-objective genetic algorithm...With the purpose of designing the extreme ultraviolet polarizer with many objectives,a combined application of multiobjective genetic algorithms is theoretically proposed.Owing to the multi-objective genetic algorithm,the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space,and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction.Compared with the conventional method of multilayer design,our method has a higher probability of achieving the optimal multilayer design.Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space,and our results demonstrate a potential application of our method in the designs of optical thin films.展开更多
基金the National Natural Science Foundation of China(Grant Nos.62175018,61905239,and 61974142)Jilin Scientific and Technological Development Plan,China(Grant Nos.20190201013JC and 20200401052GX)。
文摘With the purpose of designing the extreme ultraviolet polarizer with many objectives,a combined application of multiobjective genetic algorithms is theoretically proposed.Owing to the multi-objective genetic algorithm,the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space,and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction.Compared with the conventional method of multilayer design,our method has a higher probability of achieving the optimal multilayer design.Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space,and our results demonstrate a potential application of our method in the designs of optical thin films.
