In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a tran...In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.展开更多
In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension ...In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension Kalman filter is constructed to reduce impact brought by turntable.Then,a biaxial rotation path is designed based on the accelerometer output model,including orthogonal 22 positions and tilt 12 positions,which enhances gravity excitation on nonlinear coefficients of accelerometer.Finally,sampling is carried out for calibration and further experiments.The results of static inertial navigation experiments lasting 4000 s show that compared with the traditional method,the proposed method reduces the position error by about 390 m.展开更多
A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model ...A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.展开更多
In view of the problem that the current single-antenna GPS attitude determination system can only determine the body attitude when the sideslip angle is zero and the multiantenna GPS/SINS integrated navigation system ...In view of the problem that the current single-antenna GPS attitude determination system can only determine the body attitude when the sideslip angle is zero and the multiantenna GPS/SINS integrated navigation system is of large volume, high cost, and complex structure, this approach is presented to determine the attitude based on vector space with single-antenna GPS and accelerometers in the micro inertial measurement unit （MIMU）. It can provide real-time and accurate attitude information. Subsequently, the single-antenna GPS/SINS integrated navigation system is designed based on the combination of position, velocity, and attitude. Finally the semi- physical simulations of single-antenna GPS attitude determination system and single-antenna GPS/SINS integrated navigation system are carried out. The simulation results, based on measured data, show that the single-antenna GPS/SINS system can provide more accurate navigation information compared to the GPS/SINS system, based on the combination of position and velocity. Furthermore, the single-antenna GPS/SINS system is characteristic of lower cost and simpler structure. It provides the basis for the application of a single-antenna GPS/SINS integrated navigation system in a micro aerial vehicle （MAV）.展开更多
The noise of closed loop micro-electromechanical systems(MEMS) capacitive accelerometer is treated as one of the significant performance specifications.Traditional optimization of noise performance often focuses on de...The noise of closed loop micro-electromechanical systems(MEMS) capacitive accelerometer is treated as one of the significant performance specifications.Traditional optimization of noise performance often focuses on designing large capacitive sensitivity accelerometer and applying closed loop structure to shape total noise,but different noise sources in closed loop and their behaviors at low frequencies are seldom carefully studied,especially their behaviors with different electronic parameters.In this work,a thorough noise analysis is established focusing on the four noise sources transfer functions near 0 Hz with simplified electronic parameters in closed loop,and it is found that the total electronic noise equivalent acceleration varies differently at different frequency points,such that the noise spectrum shape at low frequencies can be altered from 1/f noise-like shape to flat spectrum shape.The bias instability changes as a consequence.With appropriate parameters settings,the 670 Hz resonant frequency accelerometer can reach resolution of 2.6 μg/(Hz)1/2 at 2 Hz and 6 μg bias instability,and 1300 Hz accelerometer can achieve 5μg/(Hz)1/2 at 2 Hz and 31 μg bias instability.Both accelerometers have flat spectrum profile from 2 Hz to 15 Hz.展开更多
Single-axis rotation technique is often used in the marine laser inertial navigation system so as to modulate the constant biases of non-axial gyroscopes and accelerometers to attain better navigation performance.Howe...Single-axis rotation technique is often used in the marine laser inertial navigation system so as to modulate the constant biases of non-axial gyroscopes and accelerometers to attain better navigation performance.However,two significant accelerometer nonlinear errors need to be attacked to improve the modulation effect.Firstly,the asymmetry scale factor inaccuracy enlarges the errors of frequent zero-cross oscillating specific force measured by non-axial accelerometers.Secondly,the traditional linear model of accelerometers can hardly measure the continued or intermittent acceleration accurately.These two nonlinear errors degrade the high-precision specific force measurement and the calibration of nonlinear coefficients because triaxial accelerometers is urgent for the marine navigation.Based on the digital signal sampling property,the square coefficients and cross-coupling coefficients of accelerometers are considered.Meanwhile,the asymmetry scale factors are considered in the I-F conversion unit.Thus,a nonlinear model of specific force measurement is established compared to the linear model.Based on the three-axis turntable,the triaxial gyroscopes are utilized to measure the specific force observation for triaxial accelerometers.Considering the nonlinear combination,the standard calibration parameters and asymmetry factors are separately estimated by a two-step iterative identification procedure.Besides,an efficient specific force calculation model is approximately derived to reduce the real-time computation cost.Simulation results illustrate the sufficient estimation accuracy of nonlinear coefficients.The experiments demonstrate that the nonlinear model shows much higher accuracy than the linear model in both the gravimetry and sway navigation validations.展开更多
A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the r...A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the relative distance between the mass center and the neutral plane were all decreased.With the thin mass structure,we can take advantage of both beam-mass structure and flat film structure;the fabrication process is also simple.By means of Hopkinson shock test system,we did the accelerometer calibration.According to the test result,the sensitivity of the MEMS accelerometer is 0.71 μV/g,which keeps in accordance with the theoretical calculation.After a 200 000 g shocking test,the micro structure worked as usual,so this design can satisfy the requirements of high shock,seriously vibration test environment.展开更多
The main principle and mathematical model of GOCE kinematic orbit adjustment for Earth gravity field model （EGM） validation and accelerometer calibration are presented. Based on 60 days GOCE kinematic orbits with 1-...The main principle and mathematical model of GOCE kinematic orbit adjustment for Earth gravity field model （EGM） validation and accelerometer calibration are presented. Based on 60 days GOCE kinematic orbits with 1-2 cm accuracy and accelerometer data from 2009-11-02 to 2009-12-31, the RMS-of-fit （ROF） of them using EGM2008, EIGEN-SC, ITG- GRACE2010S and GOCO01S up to 120, 150 and 180 degree and order （d/o） are evaluated and compared. The scale factors and biases of GOCE accelerometer data are calibrated and the energy balance method （EBM） is performed to test the accuracy of accelerometer calibration. The results show that GOCE orbits are also sensitive to EGM from 120 to 150 d/o. The ROFs of EGMs with 150 and 180 d/o are obviously better than those of EGMs with 120 d/o. The ROFs of GOCO01S and ITG-GRACE2010S are almost the same up to 120 and 150 d/o, which are about 3.3 cm and 1.8 cm, respectively. They are far better than those of EGM2008 and EIGEN-SC with the same d/o. The ROF of GOCO01S with 180 d/o is about 1.6 em, which is the best one among those EGMs. The accelerometer calibration accuracies （ACAs） of ITG-GRACE2010S and GOCO01S are obviously higher that those of EGM2008 and EIGEN-SC. The ACA of GOCO01S with 180 d/o is far higher than that of EGMs with 120 d/o, and a little higher than that of ITG-GRACE2010S with 150 d/o. I t is suggested that the newest released EGM such as GOCO01S or GOCO02S till at least 150 d/o should be chosen in GOCE precise orbit determination （POD） and accelerometer calibration.展开更多
文摘In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.
基金supported by the National Natural Science Foundation of China(42276199).
文摘In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension Kalman filter is constructed to reduce impact brought by turntable.Then,a biaxial rotation path is designed based on the accelerometer output model,including orthogonal 22 positions and tilt 12 positions,which enhances gravity excitation on nonlinear coefficients of accelerometer.Finally,sampling is carried out for calibration and further experiments.The results of static inertial navigation experiments lasting 4000 s show that compared with the traditional method,the proposed method reduces the position error by about 390 m.
基金supported by the National Natural Science Foundation of China(62205377).
文摘A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.
基金the Astronautic Technology Foundation (HTZC0405)
文摘In view of the problem that the current single-antenna GPS attitude determination system can only determine the body attitude when the sideslip angle is zero and the multiantenna GPS/SINS integrated navigation system is of large volume, high cost, and complex structure, this approach is presented to determine the attitude based on vector space with single-antenna GPS and accelerometers in the micro inertial measurement unit （MIMU）. It can provide real-time and accurate attitude information. Subsequently, the single-antenna GPS/SINS integrated navigation system is designed based on the combination of position, velocity, and attitude. Finally the semi- physical simulations of single-antenna GPS attitude determination system and single-antenna GPS/SINS integrated navigation system are carried out. The simulation results, based on measured data, show that the single-antenna GPS/SINS system can provide more accurate navigation information compared to the GPS/SINS system, based on the combination of position and velocity. Furthermore, the single-antenna GPS/SINS system is characteristic of lower cost and simpler structure. It provides the basis for the application of a single-antenna GPS/SINS integrated navigation system in a micro aerial vehicle （MAV）.
基金Project(61404122)supported by the National Natural Science Foundation of China
文摘The noise of closed loop micro-electromechanical systems(MEMS) capacitive accelerometer is treated as one of the significant performance specifications.Traditional optimization of noise performance often focuses on designing large capacitive sensitivity accelerometer and applying closed loop structure to shape total noise,but different noise sources in closed loop and their behaviors at low frequencies are seldom carefully studied,especially their behaviors with different electronic parameters.In this work,a thorough noise analysis is established focusing on the four noise sources transfer functions near 0 Hz with simplified electronic parameters in closed loop,and it is found that the total electronic noise equivalent acceleration varies differently at different frequency points,such that the noise spectrum shape at low frequencies can be altered from 1/f noise-like shape to flat spectrum shape.The bias instability changes as a consequence.With appropriate parameters settings,the 670 Hz resonant frequency accelerometer can reach resolution of 2.6 μg/(Hz)1/2 at 2 Hz and 6 μg bias instability,and 1300 Hz accelerometer can achieve 5μg/(Hz)1/2 at 2 Hz and 31 μg bias instability.Both accelerometers have flat spectrum profile from 2 Hz to 15 Hz.
基金Project(61174002)supported by the National Natural Science Foundation of ChinaProject(200897)supported by the Foundation of National Excellent Doctoral Dissertation of PR China+1 种基金Project(NCET-10-0900)supported by the Program for New Century ExcellentTalents in University,ChinaProject(131061)supported by the Fok Ying Tung Education Foundation,China
文摘Single-axis rotation technique is often used in the marine laser inertial navigation system so as to modulate the constant biases of non-axial gyroscopes and accelerometers to attain better navigation performance.However,two significant accelerometer nonlinear errors need to be attacked to improve the modulation effect.Firstly,the asymmetry scale factor inaccuracy enlarges the errors of frequent zero-cross oscillating specific force measured by non-axial accelerometers.Secondly,the traditional linear model of accelerometers can hardly measure the continued or intermittent acceleration accurately.These two nonlinear errors degrade the high-precision specific force measurement and the calibration of nonlinear coefficients because triaxial accelerometers is urgent for the marine navigation.Based on the digital signal sampling property,the square coefficients and cross-coupling coefficients of accelerometers are considered.Meanwhile,the asymmetry scale factors are considered in the I-F conversion unit.Thus,a nonlinear model of specific force measurement is established compared to the linear model.Based on the three-axis turntable,the triaxial gyroscopes are utilized to measure the specific force observation for triaxial accelerometers.Considering the nonlinear combination,the standard calibration parameters and asymmetry factors are separately estimated by a two-step iterative identification procedure.Besides,an efficient specific force calculation model is approximately derived to reduce the real-time computation cost.Simulation results illustrate the sufficient estimation accuracy of nonlinear coefficients.The experiments demonstrate that the nonlinear model shows much higher accuracy than the linear model in both the gravimetry and sway navigation validations.
基金Shanxi province young leaders on science and by program for New Century Excellent Talents in University(NCET)
文摘A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the relative distance between the mass center and the neutral plane were all decreased.With the thin mass structure,we can take advantage of both beam-mass structure and flat film structure;the fabrication process is also simple.By means of Hopkinson shock test system,we did the accelerometer calibration.According to the test result,the sensitivity of the MEMS accelerometer is 0.71 μV/g,which keeps in accordance with the theoretical calculation.After a 200 000 g shocking test,the micro structure worked as usual,so this design can satisfy the requirements of high shock,seriously vibration test environment.
基金Project(41174008)supported by the National Natural Science Foundation of ChinaProject(SKLGED2013-4-2-EZ)supported by the Open Foundation of State Key Laboratory of Geodesy and Earth’s Dynamics,ChinaProject(2007B51)supported by the Foundation for the Author of National Excellent Doctoral Dissertation of China
文摘The main principle and mathematical model of GOCE kinematic orbit adjustment for Earth gravity field model （EGM） validation and accelerometer calibration are presented. Based on 60 days GOCE kinematic orbits with 1-2 cm accuracy and accelerometer data from 2009-11-02 to 2009-12-31, the RMS-of-fit （ROF） of them using EGM2008, EIGEN-SC, ITG- GRACE2010S and GOCO01S up to 120, 150 and 180 degree and order （d/o） are evaluated and compared. The scale factors and biases of GOCE accelerometer data are calibrated and the energy balance method （EBM） is performed to test the accuracy of accelerometer calibration. The results show that GOCE orbits are also sensitive to EGM from 120 to 150 d/o. The ROFs of EGMs with 150 and 180 d/o are obviously better than those of EGMs with 120 d/o. The ROFs of GOCO01S and ITG-GRACE2010S are almost the same up to 120 and 150 d/o, which are about 3.3 cm and 1.8 cm, respectively. They are far better than those of EGM2008 and EIGEN-SC with the same d/o. The ROF of GOCO01S with 180 d/o is about 1.6 em, which is the best one among those EGMs. The accelerometer calibration accuracies （ACAs） of ITG-GRACE2010S and GOCO01S are obviously higher that those of EGM2008 and EIGEN-SC. The ACA of GOCO01S with 180 d/o is far higher than that of EGMs with 120 d/o, and a little higher than that of ITG-GRACE2010S with 150 d/o. I t is suggested that the newest released EGM such as GOCO01S or GOCO02S till at least 150 d/o should be chosen in GOCE precise orbit determination （POD） and accelerometer calibration.
