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Mode characteristics of VCSELs with different shape and size oxidation apertures 被引量:1
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作者 谢新宇 李健 +3 位作者 邱小浪 王永丽 李川川 韦欣 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第4期347-351,共5页
Vertical cavity surface emitting laser(VCSELs)as the ideal light source for rubidium(Rb)and cesium(Cs)atomic clocks is analyzed for its mode and polarization control.We fabricated three kinds of shapes:triangular,elli... Vertical cavity surface emitting laser(VCSELs)as the ideal light source for rubidium(Rb)and cesium(Cs)atomic clocks is analyzed for its mode and polarization control.We fabricated three kinds of shapes:triangular,elliptic,and circular oxidation apertures which also have different sizes.We formed three different shape oxide apertures by wetoxidation with 36μm-39μm circular mesa.Our results show that triangular oxidized-VCSEL has the advantages of mode and polarization selection over elliptic and circular oxide apertures.When triangular oxide-confined VCSELs emit in single mode,the measured side mode suppression ratio(SMSR)is larger than 20 d B and orthogonal polarization suppression ratio achieves 10 d B.Resonant blueshift of VCSELs with triangular and elliptic apertures is observed with the decrease of aperture size. 展开更多
关键词 semiconductor lasers laser diodes microcavity and microdisk lasers semiconductor-device characterization design modeling
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