To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating sched...To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating scheduling problems domain of dual-armed cluster tools,a non-integer programming model was set up with a minimizing objective function of the makespan.Combining characteristics of residency time and reentrant constraints,a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools.Finally,the experiments were designed to evaluate the proposed algorithm.The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.展开更多
基金Projects(7107111561273035)supported by the National Natural Science Foundation of China
文摘To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating scheduling problems domain of dual-armed cluster tools,a non-integer programming model was set up with a minimizing objective function of the makespan.Combining characteristics of residency time and reentrant constraints,a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools.Finally,the experiments were designed to evaluate the proposed algorithm.The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.
