A metal vapor vacuum arc （MEVVA） is used in ion implantation for substrate preparation before the deposition process which would ensure the improvement of mechanical properties of the coating. Ti ion is implanted in...A metal vapor vacuum arc （MEVVA） is used in ion implantation for substrate preparation before the deposition process which would ensure the improvement of mechanical properties of the coating. Ti ion is implanted into pure magnesium surface by MEVVA implanter operated with a modified cathode. Implanting energy is kept at 45 keV and dose is set at 3 ×10^17 cm^-2. TiN coatings are deposited by magnetically filtered vacuum-arc plasma source on unimplanted and previously implanted substrates. Microstructure and phase composition are analysed using scanning electron microscopy （SEM） and X-ray diffraction （XRD）. The property of corrosion resistance of TiN coatings was studied by CS300P electrochemistry-corrosion workstation, and the main impact factor of the corrosion resistance was also analyzed.展开更多
基金the Scientific Research Common Program of Beijing Municipal Commission of Education (No.KM200510017005)
文摘A metal vapor vacuum arc （MEVVA） is used in ion implantation for substrate preparation before the deposition process which would ensure the improvement of mechanical properties of the coating. Ti ion is implanted into pure magnesium surface by MEVVA implanter operated with a modified cathode. Implanting energy is kept at 45 keV and dose is set at 3 ×10^17 cm^-2. TiN coatings are deposited by magnetically filtered vacuum-arc plasma source on unimplanted and previously implanted substrates. Microstructure and phase composition are analysed using scanning electron microscopy （SEM） and X-ray diffraction （XRD）. The property of corrosion resistance of TiN coatings was studied by CS300P electrochemistry-corrosion workstation, and the main impact factor of the corrosion resistance was also analyzed.
