A multi-scale numerical method coupled with the reactor,sheath and trench model is constructed to simulate dry etching of SiO_2 in inductively coupled C_4F_8 plasmas.Firstly,ion and neutral particle densities in the r...A multi-scale numerical method coupled with the reactor,sheath and trench model is constructed to simulate dry etching of SiO_2 in inductively coupled C_4F_8 plasmas.Firstly,ion and neutral particle densities in the reactor are decided using the CFD-ACE＋ commercial software.Then,the ion energy and angular distributions（IEDs and IADs） are obtained in the sheath model with the sheath boundary conditions provided with CFD-ACE＋.Finally,the trench profile evolution is simulated in the trench model.What we principally focus on is the effects of the discharge parameters on the etching results.It is found that the discharge parameters,including discharge pressure,radio-frequency（rf） power,gas mixture ratios,bias voltage and frequency,have synergistic effects on IEDs and IADs on the etched material surface,thus further affecting the trench profiles evolution.展开更多
科学评估地下空间开发需求潜力是缓解城市化问题和合理拓展有限区域的重要基础工作。目前地下空间评价中的社会经济数据多来自于传统官方文件,其全面完整性和时空精度并不理想;此外主客观赋权方法的使用,一定程度上存在主观性强和受数...科学评估地下空间开发需求潜力是缓解城市化问题和合理拓展有限区域的重要基础工作。目前地下空间评价中的社会经济数据多来自于传统官方文件,其全面完整性和时空精度并不理想;此外主客观赋权方法的使用,一定程度上存在主观性强和受数据干扰等不足。文章以多源大数据支持的指标体系为基础,构建熵权-随机森林耦合的地下空间需求评价模型。该模型基于熵权法确定负样本,将总样本和指标因子导入随机森林算法中,挖掘社会经济指标与现有地下设施间的复杂非线性关系。研究表明,经过网格搜索调优后的模型AUC(area under curve)精度达到0.979,其中77.45%的现有设施落入评价的高需求区内,证明所采用模型有较强的准确性和可靠性,其精细化评价结果可为今后地下建设选址提供更符合实际的借鉴。展开更多
A new profile model based on multi-scale asperities is developed and contact error is cal- culated. After stratified sampling, the model can get the distribution law of entity points on each cross section. Asperity ra...A new profile model based on multi-scale asperities is developed and contact error is cal- culated. After stratified sampling, the model can get the distribution law of entity points on each cross section. Asperity radius of curvature is estimated by the relationship between circle radius and the section interval. Contact error is related to surface form error. A model equation of contact error plane is calculated through a method based on static equilibrium theory. Three contact asperities which determine the contact error plane on the rough surface are studied. The simulation results show that contact error can be accurately calculated according to the profile error model.展开更多
基金supported by National Natural Science Foundation of China(No.11375040)the Important National Science&Technology Specific Project of China(No.2011ZX02403-002)
文摘A multi-scale numerical method coupled with the reactor,sheath and trench model is constructed to simulate dry etching of SiO_2 in inductively coupled C_4F_8 plasmas.Firstly,ion and neutral particle densities in the reactor are decided using the CFD-ACE＋ commercial software.Then,the ion energy and angular distributions（IEDs and IADs） are obtained in the sheath model with the sheath boundary conditions provided with CFD-ACE＋.Finally,the trench profile evolution is simulated in the trench model.What we principally focus on is the effects of the discharge parameters on the etching results.It is found that the discharge parameters,including discharge pressure,radio-frequency（rf） power,gas mixture ratios,bias voltage and frequency,have synergistic effects on IEDs and IADs on the etched material surface,thus further affecting the trench profiles evolution.
文摘科学评估地下空间开发需求潜力是缓解城市化问题和合理拓展有限区域的重要基础工作。目前地下空间评价中的社会经济数据多来自于传统官方文件,其全面完整性和时空精度并不理想;此外主客观赋权方法的使用,一定程度上存在主观性强和受数据干扰等不足。文章以多源大数据支持的指标体系为基础,构建熵权-随机森林耦合的地下空间需求评价模型。该模型基于熵权法确定负样本,将总样本和指标因子导入随机森林算法中,挖掘社会经济指标与现有地下设施间的复杂非线性关系。研究表明,经过网格搜索调优后的模型AUC(area under curve)精度达到0.979,其中77.45%的现有设施落入评价的高需求区内,证明所采用模型有较强的准确性和可靠性,其精细化评价结果可为今后地下建设选址提供更符合实际的借鉴。
基金Supported by the National Natural Science Foundation of China(5107503551127004)
文摘A new profile model based on multi-scale asperities is developed and contact error is cal- culated. After stratified sampling, the model can get the distribution law of entity points on each cross section. Asperity radius of curvature is estimated by the relationship between circle radius and the section interval. Contact error is related to surface form error. A model equation of contact error plane is calculated through a method based on static equilibrium theory. Three contact asperities which determine the contact error plane on the rough surface are studied. The simulation results show that contact error can be accurately calculated according to the profile error model.
