It is of great scientific significance to construct a 3D dynamic structural color with a special color effect based on the microlens array.However,the problems of imperfect mechanisms and poor color quality need to be...It is of great scientific significance to construct a 3D dynamic structural color with a special color effect based on the microlens array.However,the problems of imperfect mechanisms and poor color quality need to be solved.A method of 3D structural color turning on periodic metasurfaces fabricated by the microlens array and self-assembly technology was proposed in this study.In the experiment,Polydimethylsiloxane(PDMS)flexible film was used as a substrate,and SiO2 microspheres were scraped into grooves of the PDMS film to form 3D photonic crystal structures.By adjusting the number of blade-coated times and microsphere concentrations,high-saturation structural color micropatterns were obtained.These films were then matched with microlens arrays to produce dynamic graphics with iridescent effects.The results showed that by blade-coated two times and SiO2 microsphere concentrations of 50%are the best conditions.This method demonstrates the potential for being widely applied in the anticounterfeiting printing and ultra-high-resolution display.展开更多
Silicon(Si)diffraction microlens arrays are usually used to integrating with infrared focal plane arrays(IRFPAs)to improve their performance.The errors of lithography are unavoidable in the process of the Si diffrac-t...Silicon(Si)diffraction microlens arrays are usually used to integrating with infrared focal plane arrays(IRFPAs)to improve their performance.The errors of lithography are unavoidable in the process of the Si diffrac-tion microlens arrays preparation in the conventional engraving method.It has a serious impact on its performance and subsequent applications.In response to the problem of errors of Si diffraction microlens arrays in the conven-tional method,a novel self-alignment method for high precision Si diffraction microlens arrays preparation is pro-posed.The accuracy of the Si diffractive microlens arrays preparation is determined by the accuracy of the first li-thography mask in the novel self-alignment method.In the subsequent etching,the etched area will be protected by the mask layer and the sacrifice layer or the protective layer.The unprotection area is carved to effectively block the non-etching areas,accurately etch the etching area required,and solve the problem of errors.The high precision Si diffraction microlens arrays are obtained by the novel self-alignment method and the diffraction effi-ciency could reach 92.6%.After integrating with IRFPAs,the average blackbody responsity increased by 8.3%,and the average blackbody detectivity increased by 10.3%.It indicates that the Si diffraction microlens arrays can improve the filling factor and reduce crosstalk of IRFPAs through convergence,thereby improving the perfor-mance of the IRFPAs.The results are of great reference significance for improving their performance through opti-mizing the preparation level of micro nano devices.展开更多
文摘It is of great scientific significance to construct a 3D dynamic structural color with a special color effect based on the microlens array.However,the problems of imperfect mechanisms and poor color quality need to be solved.A method of 3D structural color turning on periodic metasurfaces fabricated by the microlens array and self-assembly technology was proposed in this study.In the experiment,Polydimethylsiloxane(PDMS)flexible film was used as a substrate,and SiO2 microspheres were scraped into grooves of the PDMS film to form 3D photonic crystal structures.By adjusting the number of blade-coated times and microsphere concentrations,high-saturation structural color micropatterns were obtained.These films were then matched with microlens arrays to produce dynamic graphics with iridescent effects.The results showed that by blade-coated two times and SiO2 microsphere concentrations of 50%are the best conditions.This method demonstrates the potential for being widely applied in the anticounterfeiting printing and ultra-high-resolution display.
基金Supported by the National Natural Science Foundation of China(NSFC 62105100)the National Key research and development program in the 14th five year plan(2021YFA1200700)。
文摘Silicon(Si)diffraction microlens arrays are usually used to integrating with infrared focal plane arrays(IRFPAs)to improve their performance.The errors of lithography are unavoidable in the process of the Si diffrac-tion microlens arrays preparation in the conventional engraving method.It has a serious impact on its performance and subsequent applications.In response to the problem of errors of Si diffraction microlens arrays in the conven-tional method,a novel self-alignment method for high precision Si diffraction microlens arrays preparation is pro-posed.The accuracy of the Si diffractive microlens arrays preparation is determined by the accuracy of the first li-thography mask in the novel self-alignment method.In the subsequent etching,the etched area will be protected by the mask layer and the sacrifice layer or the protective layer.The unprotection area is carved to effectively block the non-etching areas,accurately etch the etching area required,and solve the problem of errors.The high precision Si diffraction microlens arrays are obtained by the novel self-alignment method and the diffraction effi-ciency could reach 92.6%.After integrating with IRFPAs,the average blackbody responsity increased by 8.3%,and the average blackbody detectivity increased by 10.3%.It indicates that the Si diffraction microlens arrays can improve the filling factor and reduce crosstalk of IRFPAs through convergence,thereby improving the perfor-mance of the IRFPAs.The results are of great reference significance for improving their performance through opti-mizing the preparation level of micro nano devices.
