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Electron density measurement of laser-induced epoxy fiber reinforced polymer plasma 被引量:1
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作者 Cong Junkai He Hengxiang +2 位作者 Xia Huijun Xiao Jing Deng Cui 《强激光与粒子束》 EI CAS CSCD 北大核心 2016年第7期54-59,共6页
Interferograms of laser-induced epoxy fiber reinforced polymer plasmas are obtained through aMach-Zehnder interferometry system.An improved digital double-exposure Fourier method is applied to extractinitial wrapped p... Interferograms of laser-induced epoxy fiber reinforced polymer plasmas are obtained through aMach-Zehnder interferometry system.An improved digital double-exposure Fourier method is applied to extractinitial wrapped phases from interferograms,and then an improved phase unwrapping algorithm based on a maskand a branch-cut method is proposed to solve the problem of phase unwrapping.After the inverse Abel transfor-mation of the unwrapped phase,spatial distributions of the electron density of laser-induced epoxy fiber rein-forced polymer plasma at various delays are acquired.Results show that the measured electron density of theplasma is mainly distributed on the order of 10^18 cm^3.The experiment also indicates that the total amount oflaser plasma electrons changes slightly within the recorded time and the change of the electron density is approx-imately inversely proportional to the change of the plasma volume. 展开更多
关键词 ELECTRON DENSITY laser induced plasma EPOXY fiber REINFORCED polymer phase of inter-ferogram
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Analysis of time phase of characteristic radiation in plasma induced by laser ablating aluminum
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作者 SONG Yi-zhong +1 位作者 ZHU Rui-fu 《原子与分子物理学报》 CAS CSCD 北大核心 2001年第4期367-371,共5页
With time and space resolved technique, we have recorded time resolved spectra of irradiation of the plasma induced by Nd: YAG laser ablating metal Aluminum in Ar, in which, laser pulse energy was set up to 145 mJ/pul... With time and space resolved technique, we have recorded time resolved spectra of irradiation of the plasma induced by Nd: YAG laser ablating metal Aluminum in Ar, in which, laser pulse energy was set up to 145 mJ/pulse and the buffer pressure 100 kpa. The continuum radiation and special emission of Aluminum plasma were studied based on the records. According to time distribution of Al Ⅰ396.15 nm emission, we analyzed the time differences between characteristic and continuum radiation evolving. We tried to explain the time phases of characteristic radiation evolving with traditional theoretical model of atomic transition. As the result, we found that it was difficult to explain our experimental results with the model. In order to explain our experimental results, we need new model or to improve the traditional theoretical model of atomic transition. 展开更多
关键词 激光剥离 激光诱导 光谱 辐射特征 等离子体
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Quantum explanation for time phase relations in radiation of the plasma induced by laser ablating aluminum
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作者 LI Zun ying 1 , SONG Yi zhong 2 (1.Department of Physics, Linyi Teachers University ZIP:276005 2. Biomaterials Lab, department of materiel science, the southern zone, Shandong University) 《原子与分子物理学报》 CAS CSCD 北大核心 2001年第3期265-268,272,共5页
According to time distribution of Al Ⅰ396.15 nm emission in the plasma induced by laser ablating Aluminum, based on quantum mechanics, we have suggested a hypothesis of transient steady state of atom, which could giv... According to time distribution of Al Ⅰ396.15 nm emission in the plasma induced by laser ablating Aluminum, based on quantum mechanics, we have suggested a hypothesis of transient steady state of atom, which could give our experimental results overall and reasonable explanation in quantum. We suggested that there should be a certain atomic state between ground and excited state of Aluminum atom, so called transient steady state. The transient steady state was that aluminum atom had already absorbed a certain photon, but the valence electron had not transited to external orbit. That is to say, aluminum atom had not transited into excited state, but changed into a certain state called transient steady state between ground and excited state. Seen from the point of atomic energy level, the transient steady state is identical to the level of excited state. The transient steady state was one of the most important models storing energy. The hypothesis could roundly and reasonably explain our experimental results. 展开更多
关键词 激光烧蚀 激光诱导 时间分辨光谱 等离子体
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Laser Induced Breakdown Spectroscopy for Comparative Quantitative Analysis of Betel Leaves from Pakistan 被引量:1
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作者 I Rehan K Rehan +1 位作者 S Sultana R Muhammad 《光谱学与光谱分析》 SCIE EI CAS CSCD 北大核心 2018年第10期3295-3302,共8页
Laser induced breakdown Spectroscopy(LIBS)was applied for the elemental analysis and exposure of the heavy metals in betel leaves in air.Pulsed Nd∶YAG(1064 nm)in conjunction with a suitable detector(LIBS 2000+,Ocean ... Laser induced breakdown Spectroscopy(LIBS)was applied for the elemental analysis and exposure of the heavy metals in betel leaves in air.Pulsed Nd∶YAG(1064 nm)in conjunction with a suitable detector(LIBS 2000+,Ocean Optics,Inc)having the optical resolution of 0.06 nm was used to record the emission spectra from 220 to 720 nm.Elements like Al,Ba,Ca,Cr,Cu,P,Fe,K,Mg,Mn,Na,P,S,Sr,and Zn were found to present in the samples.The relative abundances of the observed elements were calculated through standard calibration curve method,integrated intensity ratio method,and weight percentage LIBS approach.LIBS findings were validated by comparing its results with the results obtained using a typical analytical technique of Inductively Coupled plasma-optical emission spectroscopy(ICP-OES).Limit of detection(LOD)of the LIBS system was also estimated for heavy metals.The experience gain through this work implies that LIBS could be highly applicable for testing the quality and purity of food products. 展开更多
关键词 laser induced BREAKDOWN spectroscopy(LIBS) Spectral analysis inductively coupled plasma-optical emission SPECTROMETRY Limit of detection(LOD)
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Simultaneous Measurements of Coal Ash Composition by Laser-induced Breakdown Spectroscopy in Different Optical Collection 被引量:4
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作者 YAO Shunchun LU Jidong DONG Meirong ZHENG Jianping LI Jun ZHANG Bo 《中国电机工程学报》 EI CSCD 北大核心 2013年第11期I0008-I0008,10,共1页
针对燃煤组分分布不均匀的特性,研究不同收光模式对激光诱导击穿光谱技术同步测量灰成分的影响。选用具有不同灰成分含量梯度的燃煤样品作为检测对象,对比分析同向收光和侧向收光下灰成分组成元素谱线信号探测的强度和稳定性及SiO2、A... 针对燃煤组分分布不均匀的特性,研究不同收光模式对激光诱导击穿光谱技术同步测量灰成分的影响。选用具有不同灰成分含量梯度的燃煤样品作为检测对象,对比分析同向收光和侧向收光下灰成分组成元素谱线信号探测的强度和稳定性及SiO2、Al2O3、Fe2O3、CaO、MgO和TiO2含量定量分析的精确度。研究结果表明,相同实验条件下同向收光模式的光谱信号稳定性和定量分析精确度更好,检验样品中各灰成分的预测值和参考值之间的拟合度均在0.986以上。而侧向收光模式下探测到的光谱信号强度更强,光谱探测下限可以达到190nm。 展开更多
关键词 激光诱导 光谱仪 粉煤灰 同时测量 击穿 眼镜 组成 安全经济运行
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Hyperspectral imaging and remote trace detection of cis-1,3,4,6-tetranitrooctahydroimidazo-[4,5 d]imidazole(BCHMX)compared with traditional explosives using laser induced fluorescence
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作者 Hany S.Ayoub Ashraf F.El-Sherif Ahmed Elbeih 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2021年第5期1609-1616,共8页
cis-1,3,4,6-Tetranitrooctahydroimidazo-[4,5 d]imidazole(BCHMX)is an advanced energetic compound that expected to spread worldwide in the near future.Since,no approved remote detection methods were reported in current ... cis-1,3,4,6-Tetranitrooctahydroimidazo-[4,5 d]imidazole(BCHMX)is an advanced energetic compound that expected to spread worldwide in the near future.Since,no approved remote detection methods were reported in current literature for this material,we performed hyper-spectral imaging and laser induced fluorescence(LIF)to a BCHMX sample under low laser fluence for determining the optimum laser wavelength used in any future BCHMX-LIF based remote detection systems.For this purpose,an experimental setup consisted of a sun spectrum lamp and hyper-spectral camera was built to illuminate and image white powder samples of BCHMX in comparison with the traditional explosives,HMX(1,3,5,7-tetranitro-1,3,5,7-tetraazacyclooctane),RDX(1,3,5-trinitro-1,3,5-triazacyclohexane),PETN(2,2-Bis[(nitroxy)methyl]propane-1,3-diyldinitrate).The imaging reveals strong BCHMX sample absorption contrast among other samples at wavelength ranging from 400 to 410 nm.When light source was replaced by a 405 nm laser diode illuminator,a strong BCHMX sample LIF at the spectral range from 425 to 700 nm was observed under low laser fluence condition of 0.1 mJ/cm^(2).Finally,we demonstrated successfully the ability of the 405 nm LIF and the hyperspectral imaging technique to detect finger print traces of BCHMX on white cellulose fabric from a distance of 15 m and a detection limit of 1 mg/cm^(2). 展开更多
关键词 Hyperspectral imaging Remote trace detection BCHMX laser induced fluorescence
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Fabrication of micro carbon pillar by laser-induced chemical vapor deposition
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作者 周健 罗迎社 +3 位作者 李立君 钟琦文 李新华 殷水平 《Journal of Central South University》 SCIE EI CAS 2008年第S1期197-201,共5页
Argon ion laser was used as the induced light source and ethane(C2H4) was selected as the precursor gas,in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.... Argon ion laser was used as the induced light source and ethane(C2H4) was selected as the precursor gas,in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.3 Pa to 680×133.3 Pa,the experiments of laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar.In the experiments,the influences of power of laser and pressure of work gas on the diameter and length of micro carbon pillar were investigated,the variety on averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus was discussed.Based on experiment data,the micro carbon pillar with an aspect ratio of over 500 was built through the method of moving the focus. 展开更多
关键词 laser-induced chemical vapor deposition(LCVD) GROWING rapid DIAMETER microcarbon.
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Development of Debris-free Laser Plasma Sources for EUV Lithography in CIOMP 被引量:1
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作者 CHEN Bo, NI Qi liang,CAO Jian lin (State Key Laboratory of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences, Changchun 130022, China) 《光学精密工程》 EI CAS CSCD 2001年第5期442-445,共4页
We have been developing debris-free laser plasma sources for EUV lithography since 1996. Two types of debris-free sources, such as cryogenic target and gas-puff target laser plasma sources, were designed and built up ... We have been developing debris-free laser plasma sources for EUV lithography since 1996. Two types of debris-free sources, such as cryogenic target and gas-puff target laser plasma sources, were designed and built up in CIOMP. EUV radiation spectra of the sources with a variety of targets have been obtained by different ways. 展开更多
关键词 EUV LITHOGRAPHY laser plasma DEBRIS - free CRYOGENIC TARGET gas - PUFF TARGET
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Experimental investigation of laser-produced-plasma EUV source based on liquid target 被引量:6
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作者 QI Li-hong NI Qi-liang CHEN Bo 《光学精密工程》 EI CAS CSCD 北大核心 2005年第5期604-607,共4页
A laser-produced plasma(LPP) source was built using liquid as target and a Nd:YAG laser as the irradiation laser, and the LPP source's radiation with ethanol and acetone target respectively was measured by an AXUV... A laser-produced plasma(LPP) source was built using liquid as target and a Nd:YAG laser as the irradiation laser, and the LPP source's radiation with ethanol and acetone target respectively was measured by an AXUV100 silicon photodiode combined with a McPHERSON model 247 grazing incidence monochromator of the resolution Δλ≤0.075 nm and the wavelength scanning interval 0.5 nm. Both ethanol and acetone target LPP source had EUV emission at 11~20 nm wavelength. The comparison between the spectra of the two kinds of target materials shows that all the two kinds of target source's spectra are the result of oxygen ions' transitions under current source's parameters, but the spectrum intensity from different target sources is different. The spectra intensity from the ethanol target is higher than that from the acetone target. In addition, the target liquid is forced into the vacuum chamber by the background pressure supported by the connected external high pressure gas, and the influence of the background pressure on the source's intensity is investigated. 展开更多
关键词 LPP 激光 等离子体 亮度
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Characteristics of Laser Produced Plasmas Obtained by Fast ICCD Photography, Schlieren Photography and Optical Emission Spectroscopy 被引量:2
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作者 WEI Wenfu WU Jian LI Xingwen JIA Shenli QIU Aici 《高电压技术》 EI CAS CSCD 北大核心 2013年第9期2173-2179,共7页
Pulsed laser produced plasmas(LPP)are important for industrial applications and fundamental researches,and their complex,multi-physical and cross-chemical processes need to be investigated more comprehensively.In this... Pulsed laser produced plasmas(LPP)are important for industrial applications and fundamental researches,and their complex,multi-physical and cross-chemical processes need to be investigated more comprehensively.In this work,images of the luminous plasma,the spatial density distribution,and the plasma parameters are experimentally investigated by using fast ICCD photography,schlieren photography,and optical emission spectroscopy.Plasmas are produced by a 1 064 nm,15 ns Nd:YAG laser.Free expanding and splitting phenomena are observed in vacuum(at the pressure of about 1×10 3Pa)and air(at the pressure of 20 Pa)using fast photography,respectively.Meanwhile,shock waves formed in the atmospheric laser produced plasma are visualized by schlieren photography.The formation of shock waves is interpreted with the Sedov-Taylor theory,and an averaged expansion velocity about 375 m/s of the shock waves is estimated during 200~1 000 ns.Atmospheric air is found to have significant confinement effects on the plasma expansions compared to that in vacuum or low pressure ambient.Based on the optical emission spectroscopy,after 1 000 ns,at 0.6 mm above the target,the plasma temperature is about 7 800 K and the electron number density is approximately 0.64×1016cm-3. 展开更多
关键词 等离子体密度 发射光谱仪 纹影摄影 激光产生 ICCD 生产 特性 等离子体参数
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Cooperative effect of surface alloying and laser texturing on tribological performance of lubricated surfaces 被引量:5
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作者 万轶 熊党生 李建亮 《Journal of Central South University》 SCIE EI CAS 2010年第5期906-910,共5页
The cooperative effect of laser surface texturing(LST) and double glow plasma surface alloying on tribological performance of lubricated sliding contacts was investigated.A Nd:YAG laser was used to generate microdimpl... The cooperative effect of laser surface texturing(LST) and double glow plasma surface alloying on tribological performance of lubricated sliding contacts was investigated.A Nd:YAG laser was used to generate microdimples on steel surfaces. Dimples with the diameter of 150μm and the depth of 30-35μm distributed circumferentially on the disc surface.The alloying element Cr was sputtered to the laser texturing steel surface by double glow plasma technique.A deep diffusion layer with a thickness of 30μm and a high hardness of HV900 was formed in this alloy.Tribological experiments of three types of samples(smooth,texturing and texturing+alloying) were conducted with a ring-on-disc tribometer to simulate the face seal.It is found that,in comparison with smooth steel surfaces,the laser texturing samples significantly reduce the friction coefficient.Moreover,the lower wear rate of the sample treated with the two surface techniques is observed. 展开更多
关键词 laser surface texturing double glow plasma surface alloying technology carbon steel tribological performance lubricated surface
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Spatiotemporal evolution of high-aspect-ratio filamentary trace in sapphire of picosecond pulse burst-mode for laser lift-off 被引量:2
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作者 SUN Wei-gao YAN Tian-yang +1 位作者 WANG Yu-heng JI Ling-fei 《Journal of Central South University》 SCIE EI CAS CSCD 2022年第10期3304-3311,共8页
The influence of the picosecond(ps) pulsed burst with a nanosecond scale of temporal separation(50 ns) on filamentary traces in sapphire substrate is investigated. The spatiotemporal evolution of the filamentary plasm... The influence of the picosecond(ps) pulsed burst with a nanosecond scale of temporal separation(50 ns) on filamentary traces in sapphire substrate is investigated. The spatiotemporal evolution of the filamentary plasma string induced by sub-pulses of the burst-mode is revealed according to the analysis of the instantaneous photoluminescence images. Due to the presence of residual plasma, the energy loss of sub-pulse during the balancing of self-focusing effect is reduced, and thus refreshes the plasma via refocusing. The refreshed plasma peak generated by the subsequent subpulse appears at relatively low density positions in the formed filamentary plasma string, which results in more uniform densities and less spatial overlap among the plasma peaks. The continuity and uniformity of the filamentary trace in sapphire are enhanced by the burst-mode. Besides, the burst filamentary propagation can also remain effective when the sub-pulse energy is below the self-focusing threshold. Based on this uniform and precise energy propagation mode, the feasibility of its use for the laser lift-off(LLO) process is verified. 展开更多
关键词 picosecond laser filamentary plasma string BURST-MODE spatiotemporal evolution laser lift-off
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Investigation of high power laser coatings 被引量:1
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作者 SHAO Jian-da FAN Zheng-xiu 《光学精密工程》 EI CAS CSCD 北大核心 2005年第4期471-479,共9页
High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating... High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating characters of laser damage, including determination of laser induced damage threshold and detection of absorption based on surface thermal lensing technique. Defect was deemed to be the initial source of laser damage, and was the main factor restricting the laser damage resistance of optical coatings. The contribution of several kinds of typical defects to laser damage was analyzed, and some deposition measures were adopted to control and eliminate the origin of defect. Furthermore, some post-treatment methods were also employed to alleviate the influence of the defect and to improve the laser damage resistance. Correction mask was introduced to improve the thickness uniformity, and the thickness uniformity can be amended to less than 1% in the range of Φ650 mm. Preliminary investigation related to surface deformation was also conducted. 展开更多
关键词 激光涂覆技术 LIDT 吸收能力 激光器
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Optical coatings for fiber lasers 被引量:1
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作者 HONG Dong-mei ZHU Zhen YUE Wei 《光学精密工程》 EI CAS CSCD 北大核心 2005年第4期480-482,共3页
Fiber laser is the future development direction for the high energy lasers. This paper describs two kinds of optical coatings for fiber laser, including long and short wave pass filters. The one characteristic of fibe... Fiber laser is the future development direction for the high energy lasers. This paper describs two kinds of optical coatings for fiber laser, including long and short wave pass filters. The one characteristic of fiber laser coatings lies in that coatings should separate two closely wavelength light including laser pump wavelength (980 nm) and laser irradiation wavelength(1 050~1 100 nm). At the same time, the coatings should have high laser damage threshold. 展开更多
关键词 光纤激光器 光学涂覆技术 结构设计 波长
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POTENTIAL SAFE TERMINATION BY LASER ABLATION OF HIGH Z IMPURITY IN THE HL-1M TOKAMAK
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作者 ZHENG Yongzhen, FENG Xingya,GUO Gancheng, XU Deming, DENG Zhongchao (Southwestern Institute of Physics, Chengdu 610041) 《核聚变与等离子体物理》 CAS CSCD 北大核心 2003年第3期147-152,共6页
A preliminary experiment for triggering a plasma current quench by high Z impurities has been performed on the HL1M tokamak.Using injection of impurity with the higher charge of the nuclei allows us to increase the ra... A preliminary experiment for triggering a plasma current quench by high Z impurities has been performed on the HL1M tokamak.Using injection of impurity with the higher charge of the nuclei allows us to increase the radiation cooling.It can be a simple and potential approach for decreasing significantly the plasma thermal energy before a disruption and for safe termination of the plasma. 展开更多
关键词 等离子体 激光消融 高Z杂质 HL-1M装置 托卡马克装置 分裂
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普通铅对LA-ICP-MS磷灰石U-Pb定年结果的影响及校正方法 被引量:1
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作者 罗涛 王瀚林 +2 位作者 朱松柏 卿丽媛 胡兆初 《岩矿测试》 CAS 北大核心 2025年第1期51-62,共12页
磷灰石是火成岩、变质岩和沉积岩中广泛分布的含铀矿物,开展磷灰石U-Pb年代学研究对揭示岩浆演化过程、示踪溯源等方面具有重要意义。激光剥蚀电感耦合等离子体质谱法(LA-ICP-MS)是开展磷灰石U-Pb年龄微区分析的重要手段之一。当前,基... 磷灰石是火成岩、变质岩和沉积岩中广泛分布的含铀矿物,开展磷灰石U-Pb年代学研究对揭示岩浆演化过程、示踪溯源等方面具有重要意义。激光剥蚀电感耦合等离子体质谱法(LA-ICP-MS)是开展磷灰石U-Pb年龄微区分析的重要手段之一。当前,基体匹配磷灰石U-Pb定年矿物标样缺乏和标样中不可避免的普通铅是制约LA-ICP-MS高精度磷灰石U-Pb年龄分析的主要瓶颈。本文对比研究了标样中普通铅对LA-ICP-MS磷灰石U-Pb定年结果的影响,采用含普通铅的磷灰石MAD作外标直接开展U-Pb年龄校正,获得的被测样品年龄会产生显著的系统偏差(最大约6%);采用207Pb法或Tera-Wasserburg图解法先校正标样中普通铅,再利用校正后的数据进行元素分馏和仪器漂移校正则可获得准确的磷灰石U-Pb年龄,与推荐值偏差在2%以内。另一方面,为消除标样中普通铅对分析结果的影响,本文还采用水蒸气辅助激光剥蚀方法,实现以NIST612玻璃作为外标准确分析磷灰石U-Pb年龄,解决了磷灰石U-Pb定年微区分析高质量标样缺乏的难题。本研究通过对标样中普通铅进行预校正或采用非基体匹配分析,建立了高精度LA-ICP-MS磷灰石U-Pb定年新方法,将促进磷灰石U-Pb年代学在地球科学研究中的应用。 展开更多
关键词 激光剥蚀电感耦合等离子体质谱法 磷灰石 U-PB定年 普通铅校正 非基体匹配分析
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紫外-荧光特征级融合结合CARS-BO-LSSVM的水质COD检测方法 被引量:1
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作者 郑培超 李成林 +5 位作者 王金梅 杨琴 曾金锐 吕强 阮伟 何浩楠 《中国测试》 北大核心 2025年第4期91-99,共9页
化学需氧量(COD)是表征水体中有机物含量的重要指标。使用基于不同光谱法的算法模型可以实现地表水COD的快速准确检测,针对紫外吸收光谱法和激光诱导荧光光谱法在测量精度上的不足,提出基于紫外-荧光特征级融合的光谱检测方法。将采集... 化学需氧量(COD)是表征水体中有机物含量的重要指标。使用基于不同光谱法的算法模型可以实现地表水COD的快速准确检测,针对紫外吸收光谱法和激光诱导荧光光谱法在测量精度上的不足,提出基于紫外-荧光特征级融合的光谱检测方法。将采集的实际水样经标准化学法得到COD理化值,以氘卤灯作为紫外-可见光源和以405 nm单波长半导体激光器作为激发光源,采用自主搭建的光谱系统采集水样的紫外吸收光谱和荧光发射光谱。选择Savitzky-Golay滤波对光谱去噪平滑,由竞争性自适应重加权采样(CARS)对光谱进行特征提取,并与主成分分析、连续投影算法对比,以贝叶斯优化的最小二乘支持向量(BO-LSSVM)算法作为建模方法,分别建立基于紫外吸收光谱法、激光诱导荧光光谱法和紫外-荧光特征级融合法的预测模型。结果表明:采用紫外-荧光特征级融合法的预测模型性能优于单一光谱法,提出的基于紫外-荧光特征级融合结合CARS-BO-LSSVM模型在噪声容限和预测精度方面优于其他模型,训练集R2为0.9371、RMSE为0.2726 mg·L^(–1)、MRE为9.99%,测试集R2为0.9377、RMSE为0.2578 mg·L^(–1)、MRE为7.68%。该方法对水质光谱的非线性分析具有良好的泛化性和鲁棒性,可为水质COD的快速检测提供可靠的参考价值和研究思路。 展开更多
关键词 化学需氧量 激光诱导荧光 特征级数据融合 竞争性自适应重加权采样
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气体放电与等离子体在芯片制造领域中的应用
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作者 付洋洋 王新新 +11 位作者 邹晓兵 韩星 陈佳毅 张东荷雨 陈健东 林楚彬 杨栋 贾鸿宇 王倩 郑博聪 赵凯 肖舒 《高电压技术》 北大核心 2025年第8期4458-4477,共20页
放电等离子体广泛应用于半导体芯片制造,包括光刻、刻蚀、薄膜沉积、离子注入、等离子体清洗等,其技术总成占据集成电路产业份额1/3以上,已发展成为芯片制造工艺与装备领域的关键核心技术。该文对气体放电与等离子体在芯片制造领域的典... 放电等离子体广泛应用于半导体芯片制造,包括光刻、刻蚀、薄膜沉积、离子注入、等离子体清洗等,其技术总成占据集成电路产业份额1/3以上,已发展成为芯片制造工艺与装备领域的关键核心技术。该文对气体放电与等离子体在芯片制造领域的典型应用进行了概述。首先,针对光刻光源系统,介绍了气体放电泵浦准分子激光、激光产生等离子体辐射极紫外光的基本原理,其本质都是利用等离子体产生的光辐射;其次,针对刻蚀用射频等离子体,介绍了低气压射频放电的产生、特性、调控及相关工艺技术;再次,对薄膜工艺、离子注入装备原理及相关放电等离子体技术原理进行了介绍与讨论;随后,在量测与检测方面,分别介绍了光学检测与电子束检测的特点,阐述了激光维持等离子体实现宽谱强辐射光源的基本原理与特性;最后,介绍了基于辉光放电的等离子体清洗技术,以及其在去除刻蚀残留物中的应用。通过总结梳理气体放电与等离子体在半导体制造领域中的应用及相关核心技术,明晰放电等离子体科学基础研究方向,助力解决半导体装备国产化过程中的等离子体技术瓶颈。 展开更多
关键词 气体放电 等离子体 芯片制造 气体激光 等离子体辐射 射频放电 等离子体刻蚀 激光维持等离子体 辉光放电清洗
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激光入射角对高频激光诱导击穿光谱信号强度及重复性的影响研究
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作者 杨文锋 谢旻玥 +6 位作者 钱自然 李绍龙 曹宇 林德惠 吕双祺 杨晓强 华海杰 《光谱学与光谱分析》 北大核心 2025年第7期1999-2007,共9页
原位、实时的在线监测技术有助于提升飞机蒙皮激光除漆过程的可控性。激光诱导击穿光谱(LIBS)是一种高效且快速的元素分析技术,通过激光材料作用过程中产生的等离子体光谱信息快速分析漆层元素变化,实现智能化激光可控除漆。LIBS技术在... 原位、实时的在线监测技术有助于提升飞机蒙皮激光除漆过程的可控性。激光诱导击穿光谱(LIBS)是一种高效且快速的元素分析技术,通过激光材料作用过程中产生的等离子体光谱信息快速分析漆层元素变化,实现智能化激光可控除漆。LIBS技术在地质探测、成分检测、过程监测等领域也展现了广泛的应用潜力。而受监测对象外轮廓或表面形态限制,采用LIBS技术进行探测、检测、监测时,不可避免出现激光以非垂直入射方式与材料表面作用,促使诱发的等离子体光谱强度及稳定性出现波动,影响基于LIBS技术的地质探测、成分检测、过程监测结果。因此,为提高LIBS分析的准确性,需要考虑激光入射角对LIBS光谱强度及重复性的影响。论文针对飞机蒙皮自由曲面或几何突变区域的激光除漆LIBS在线监测,采集了不同激光入射角下的LIBS光谱,采用基线校正对原始光谱进行数据预处理,并选取6条特征谱线作为分析光谱,研究了激光入射角对LIBS光谱特征信号强度及其重复性的变化规律与成因。结果表明,在激光入射角从90°下降至60°(间隔5°)范围,特征峰强度随激光入射角的减小总体呈“先增大后减小”的规律,其中特征谱线TiⅠ429.926 nm对激光入射角有较好的敏感程度和响应特性。当激光入射角为75°时,特征谱线TiⅠ429.926 nm的特征峰强度相比于激光入射角为90°的特征峰强度增加了近145%,该结果说明激光入射角的选取有利于提升光谱信号质量、增强信号强度。此外,特征谱线TiⅠ429.926 nm的特征峰强度在激光入射角75°~65°范围内重复性较好,而其余元素特征峰强度在激光入射角为85°时重复性较好。本研究阐述了激光以垂直、非垂直入射方式时LIBS特征光谱的联系和差异,揭示了激光入射角对LIBS特征信号多维度特性的影响机制,可为激光非垂直入射时的LIBS探测、检测、监测提供借鉴和参考。 展开更多
关键词 激光入射角 激光诱导击穿光谱 监测 激光非垂直入射
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基于高功率激光的Cu基电接触材料的耐烧蚀性能评估
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作者 李文华 王紫恒 +3 位作者 崔得锋 李本禄 孟宪春 王海涛 《武汉科技大学学报》 北大核心 2025年第5期376-386,共11页
为解决传统电接触材料耐烧蚀性能测试周期长、成本高的问题,本文提出并建立了一种基于高功率激光烧蚀的快速评估方法,通过与传统电接触试验进行交叉对比验证,建立了一套包含线性烧蚀速率Rm、烧蚀坑形状因子F等多维度评价参数的性能评估... 为解决传统电接触材料耐烧蚀性能测试周期长、成本高的问题,本文提出并建立了一种基于高功率激光烧蚀的快速评估方法,通过与传统电接触试验进行交叉对比验证,建立了一套包含线性烧蚀速率Rm、烧蚀坑形状因子F等多维度评价参数的性能评估体系。结果表明,该激光烧蚀方法具有高度的可重复性,且其核心评价参数Rm与传统电接触试验的关键参数Sa展现出强正相关性(Pearson系数大于0.8),证实了其可靠的预测能力。所建立的评价体系能够有效地区分不同材料在纵向(抵抗深度烧蚀)与横向(抑制表面扩展)维度上的耐烧蚀性能差异。应用该体系评价了两种Mo-Cu复合材料,明确了Mo含量为20%的样品,其综合耐烧蚀性能显著优于15%的样品。 展开更多
关键词 激光烧蚀 电接触材料 耐烧蚀性能 等离子体 烧蚀形貌
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