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Mechanical Properties and Uniformity of Nanocrystalline Diamond Coating Deposited Around a Sphere by MPCVD 被引量:1
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作者 陈虹运 芶立 《Plasma Science and Technology》 SCIE EI CAS CSCD 2015年第12期1038-1042,共5页
Nanocrystalline diamond coatings were deposited by MPCVD on the spheres used for a ball bearing.The nanocrystalline coatings with a grain size of 50 nm were confirmed by the surface morphology and composition analysis... Nanocrystalline diamond coatings were deposited by MPCVD on the spheres used for a ball bearing.The nanocrystalline coatings with a grain size of 50 nm were confirmed by the surface morphology and composition analysis.The hardness of the coating is 20-40 GPa tested by nanoindentation,which is higher than that of tungsten carbide and silicon nitride substrates.The coating around the sphere observed from the Micro CT images is uniform with a thickness of 12 μm. 展开更多
关键词 diamond Diamond nitride tungsten spheres carbide modulus roughness hardness graphite
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