A novel 6-PSS flexible parallel mechanism was presented,which employed wide-range flexure hinges as passive joints.The proposed mechanism features micron level positioning accuracy over cubic centimeter scale workspac...A novel 6-PSS flexible parallel mechanism was presented,which employed wide-range flexure hinges as passive joints.The proposed mechanism features micron level positioning accuracy over cubic centimeter scale workspace.A three-layer back-propagation(BP) neural network was utilized to the kinematics analysis,in which learning samples containing 1 280 groups of data based on stiffness-matrix method were used to train the BP model.The kinematics performance was accurately calculated by using the constructed BP model with 19 hidden nodes.Compared with the stiffness model,the simulation and numerical results validate that BP model can achieve millisecond level computation time and micron level calculation accuracy.The concept and approach outlined can be extended to a variety of applications.展开更多
The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the anal...The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the analyses of the dynamic characteristics of existing linear motion stages using a dynamic analysis program, Recurdyn. Because the scanning speed of each direction may differ, the linear motion stage for a high-speed scanner was designed to have different resonance frequencies for the modes, with one dominant displacement in the desired directions. This objective was achieved by using one-direction flexure mechanisms for each direction and mounting one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separated the frequencies of two vibration modes with one dominant displacement in each desired direction, and hence suppressed the coupling between motions in two directions. A pair of actuators was used for each axis to decrease the crosstalk between the two motions and give a sufficient force to actuate the slow motion stage, which carried the fast motion stage, A lossy material, such as grease, was inserted into the flexure hinge to suppress vibration problems that occurred when using an input triangular waveforrn. With these design modifications and the vibration suppression method, a novel scanner with a scanning speed greater than 20 Hz is achieved.展开更多
基金Project(2002AA422260) supported by the National High Technology Research and Development Program of ChinaProject(2011-6) supported by CAST-HIT Joint Program,ChinaProject supported by Harbin Institute of Technology (HIT) Overseas Talents Introduction Program,China
文摘A novel 6-PSS flexible parallel mechanism was presented,which employed wide-range flexure hinges as passive joints.The proposed mechanism features micron level positioning accuracy over cubic centimeter scale workspace.A three-layer back-propagation(BP) neural network was utilized to the kinematics analysis,in which learning samples containing 1 280 groups of data based on stiffness-matrix method were used to train the BP model.The kinematics performance was accurately calculated by using the constructed BP model with 19 hidden nodes.Compared with the stiffness model,the simulation and numerical results validate that BP model can achieve millisecond level computation time and micron level calculation accuracy.The concept and approach outlined can be extended to a variety of applications.
基金Work(R0A-2007-000-20042-0) partly supported by the Second Stage of Brain Korea 21 Projectspartly by the Korea Science and Engineering Foundation (KOSEF) through the National Research Laboratory Program funded by the Ministry of Science and Technology of Korea
文摘The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the analyses of the dynamic characteristics of existing linear motion stages using a dynamic analysis program, Recurdyn. Because the scanning speed of each direction may differ, the linear motion stage for a high-speed scanner was designed to have different resonance frequencies for the modes, with one dominant displacement in the desired directions. This objective was achieved by using one-direction flexure mechanisms for each direction and mounting one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separated the frequencies of two vibration modes with one dominant displacement in each desired direction, and hence suppressed the coupling between motions in two directions. A pair of actuators was used for each axis to decrease the crosstalk between the two motions and give a sufficient force to actuate the slow motion stage, which carried the fast motion stage, A lossy material, such as grease, was inserted into the flexure hinge to suppress vibration problems that occurred when using an input triangular waveforrn. With these design modifications and the vibration suppression method, a novel scanner with a scanning speed greater than 20 Hz is achieved.
