A key to successful consistent plasma processing is maintaining a consistent process chamber condition over a certain production period.To alleviate the concern,in situ process monitoring sensors are employed to inves...A key to successful consistent plasma processing is maintaining a consistent process chamber condition over a certain production period.To alleviate the concern,in situ process monitoring sensors are employed to investigate the plasma chamber conditions of both the deposition step with direct plasma and the cleaning step with a remote plasma system.In situ sensors are optical emission spectroscopy (OES),optical plasma monitoring sensors (OPMS),voltage current probes (Ⅵ-probes),and self-plasma OES (SP-OES).During the deposition,we perform the monitoring of a plasma condition associated with the applied RF power via OES,OPMS,and a Ⅵ-probe.In the chamber cleaning step using a remote plasma system does not allow plasma monitoring through the sidewall because the plasma is not formed in the process chamber,thus we employed SP-OES to monitor the by-product gas chemistry during the chamber cleaning process step.Successful monitoring results with some useful applications,such as arc detection,part failure detection,and cleaning process chemistry analysis,are presented in this paper.The use of in situ sensors with proper combination can help to understand the plasma process better,to achieve more precise control of plasma processing.展开更多
Gonghe bridge is a double level cable-stayed concrete bridge with a single-cable-plane of single cable tower. Its span is 114+120 m and a whole length of 236 m. The gliding scaffold equipment is used for the first tim...Gonghe bridge is a double level cable-stayed concrete bridge with a single-cable-plane of single cable tower. Its span is 114+120 m and a whole length of 236 m. The gliding scaffold equipment is used for the first time in the long span cable-stayed bridge construction to reduce the construction time limit. In the process of construction, to make sure a safe connection among concrete objects with different ages, the single-supporting and single-suspension system is adopted before the concrete pouring. While the double-supporting and single-suspension system is applied after con- crete pouring. These construction systems with gliding scaffold equipment are first introduced in long span ca- ble-stayed bridge and presented in detail[1]. The practice shows that these gliding scaffold systems have many advan- tages over the traditional ones.展开更多
文摘A key to successful consistent plasma processing is maintaining a consistent process chamber condition over a certain production period.To alleviate the concern,in situ process monitoring sensors are employed to investigate the plasma chamber conditions of both the deposition step with direct plasma and the cleaning step with a remote plasma system.In situ sensors are optical emission spectroscopy (OES),optical plasma monitoring sensors (OPMS),voltage current probes (Ⅵ-probes),and self-plasma OES (SP-OES).During the deposition,we perform the monitoring of a plasma condition associated with the applied RF power via OES,OPMS,and a Ⅵ-probe.In the chamber cleaning step using a remote plasma system does not allow plasma monitoring through the sidewall because the plasma is not formed in the process chamber,thus we employed SP-OES to monitor the by-product gas chemistry during the chamber cleaning process step.Successful monitoring results with some useful applications,such as arc detection,part failure detection,and cleaning process chemistry analysis,are presented in this paper.The use of in situ sensors with proper combination can help to understand the plasma process better,to achieve more precise control of plasma processing.
文摘Gonghe bridge is a double level cable-stayed concrete bridge with a single-cable-plane of single cable tower. Its span is 114+120 m and a whole length of 236 m. The gliding scaffold equipment is used for the first time in the long span cable-stayed bridge construction to reduce the construction time limit. In the process of construction, to make sure a safe connection among concrete objects with different ages, the single-supporting and single-suspension system is adopted before the concrete pouring. While the double-supporting and single-suspension system is applied after con- crete pouring. These construction systems with gliding scaffold equipment are first introduced in long span ca- ble-stayed bridge and presented in detail[1]. The practice shows that these gliding scaffold systems have many advan- tages over the traditional ones.
