A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are...A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are developed as design and mask pattern verification module,database module, and device characteristics simulation module. All the operations are controlled under Microsoft Windows GUI interface. This leads to a reduced design and fabrication cycle, workload and cost. With the knowledge-based library for intelligent design and Lotus Notes database for distributed and networked engineering database management (EDM) and effective control of documents, a new enterprise-leveled, computer-integrated design and manufacturing system (CIDMS)can be established for monolithic and hybrid device design (not only confined to SAW device).展开更多
A new complementary metal oxide semiconductor UV/blue-extended photodiode was presented for light detection in the UV/blue spectral range. Photoelectric characteristics of this presented photodiode were studied by num...A new complementary metal oxide semiconductor UV/blue-extended photodiode was presented for light detection in the UV/blue spectral range. Photoelectric characteristics of this presented photodiode were studied by numerical modeling and device simulation. Technology computer aided design simulation was done first to analyze its photoelectric characteristics. The structure characteristic and depletion situation of space between two adjacent P+ anodes were discussed. The reverse characteristic, spectral response characteristic and DC characteristic were discussed in detail. For the numerical modeling, dead layer effect is considered in the building of analytical mode. Dead layer is a space in which the boron doping profile decreases towards the surface due to high doping effects and boron redistribution, which affects the sensitivity of photodiode in the UV range seriously. Reverse characteristics and spectral response characteristics were modeled and analyzed typically. At last, silicon test results were given and compared with the simulated result, which shows reasonable match for each.展开更多
文摘A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are developed as design and mask pattern verification module,database module, and device characteristics simulation module. All the operations are controlled under Microsoft Windows GUI interface. This leads to a reduced design and fabrication cycle, workload and cost. With the knowledge-based library for intelligent design and Lotus Notes database for distributed and networked engineering database management (EDM) and effective control of documents, a new enterprise-leveled, computer-integrated design and manufacturing system (CIDMS)can be established for monolithic and hybrid device design (not only confined to SAW device).
基金Projects(61233010,61274043)supported by the National Natural Science Foundation of ChinaProject(NCET-11-0975)supported by the Program for New Century Excellent Talents in University,China
文摘A new complementary metal oxide semiconductor UV/blue-extended photodiode was presented for light detection in the UV/blue spectral range. Photoelectric characteristics of this presented photodiode were studied by numerical modeling and device simulation. Technology computer aided design simulation was done first to analyze its photoelectric characteristics. The structure characteristic and depletion situation of space between two adjacent P+ anodes were discussed. The reverse characteristic, spectral response characteristic and DC characteristic were discussed in detail. For the numerical modeling, dead layer effect is considered in the building of analytical mode. Dead layer is a space in which the boron doping profile decreases towards the surface due to high doping effects and boron redistribution, which affects the sensitivity of photodiode in the UV range seriously. Reverse characteristics and spectral response characteristics were modeled and analyzed typically. At last, silicon test results were given and compared with the simulated result, which shows reasonable match for each.
