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Computer Controlled Polishing of the Off-axis Aspheric Mirrors 被引量:4
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作者 ZHANG Xue jun,WENG Zhi cheng,ZHANG Zhong yu, WANG Quan dou,ZHANG Feng (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China) 《光学精密工程》 EI CAS CSCD 2001年第5期467-473,共7页
In this paper, the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors ar... In this paper, the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed, and a possible solution is given. The two mirrors have been polished by means of CCOS, and the final accuracy is 25nm rms for 770mm×210mm rectangular mirror and 20nm rms for φ600mm circular mirror. These results just meet the optical tolerances specified by the designer, and the manufacturing and testing procedures presented here show good ability to make the large off-axis aspherical mirrors. 展开更多
关键词 asphere computer-controlled POLISHING OPTICAL TESTING
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