To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating sched...To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating scheduling problems domain of dual-armed cluster tools,a non-integer programming model was set up with a minimizing objective function of the makespan.Combining characteristics of residency time and reentrant constraints,a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools.Finally,the experiments were designed to evaluate the proposed algorithm.The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.展开更多
To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an obj...To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools.Firstly,mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain.Resource conflicts were analyzed in the built scheduling model,and policies to solve resource conflicts were built.A scheduling algorithm was developed.Finally,the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations.Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.展开更多
The thermal-induced error is a very important sour ce of machining errors of machine tools. To compensate the thermal-induced machin ing errors, a relationship model between the thermal field and deformations was need...The thermal-induced error is a very important sour ce of machining errors of machine tools. To compensate the thermal-induced machin ing errors, a relationship model between the thermal field and deformations was needed. The relationship can be deduced by virtual of FEM (Finite Element Method ), ANN (Artificial Neural Network) or MRA (Multiple Regression Analysis). MR A is on the basis of a total understanding of the temperature distribution of th e machine tool. Although the more the temperatures measured are, the more accura te the MRA is, too more temperatures will hinder the analysis calculation. So it is necessary to identify the key temperatures of the machine tool. The selectio n of key temperatures decides the efficiency and precision of MRA. Because of th e complexities and multi-input and multi-output structure of the relationships , the exact quantitative portions as well as the unclear portions must be taken into consideration together to improve the identification of key temperatures. I n this paper, a fuzzy cluster analysis was used to select the key temperatures. The substance of identifying the key temperatures is to group all temperatures b y their relativity, and then to select a temperature from each group as the repr esentation. A fuzzy cluster analysis can uncover the relationships between t he thermal field and deformations more truly and thoroughly. A fuzzy cluster ana lysis is the cluster analysis based on fuzzy sets. Given U={u i|i=0,...,N}, in which u i is the temperature measured, a fuzzy matrix R can be obta ined. The transfer close package t(R) can be deduced from R. A fuzzy clu ster of U then conducts on the basis of t(R). Based on the fuzzy cluster analysis discussed above, this paper identified the k ey temperatures of a horizontal machining center. The number of the temperatures measured was reduced to 4 from 32, and then the multiple regression relationshi p models between the 4 temperatures and the thermal deformations of the spindle were drawn. The remnant errors between the regression models and measured deform ations reached a satisfying low level. At the same time, the decreasing of tempe rature variable number improved the efficiency of measure and analysis greatly.展开更多
基金Projects(7107111561273035)supported by the National Natural Science Foundation of China
文摘To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating scheduling problems domain of dual-armed cluster tools,a non-integer programming model was set up with a minimizing objective function of the makespan.Combining characteristics of residency time and reentrant constraints,a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools.Finally,the experiments were designed to evaluate the proposed algorithm.The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.
基金Projects(71071115,60574054) supported by the National Natural Science Foundation of China
文摘To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools.Firstly,mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain.Resource conflicts were analyzed in the built scheduling model,and policies to solve resource conflicts were built.A scheduling algorithm was developed.Finally,the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations.Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.
文摘The thermal-induced error is a very important sour ce of machining errors of machine tools. To compensate the thermal-induced machin ing errors, a relationship model between the thermal field and deformations was needed. The relationship can be deduced by virtual of FEM (Finite Element Method ), ANN (Artificial Neural Network) or MRA (Multiple Regression Analysis). MR A is on the basis of a total understanding of the temperature distribution of th e machine tool. Although the more the temperatures measured are, the more accura te the MRA is, too more temperatures will hinder the analysis calculation. So it is necessary to identify the key temperatures of the machine tool. The selectio n of key temperatures decides the efficiency and precision of MRA. Because of th e complexities and multi-input and multi-output structure of the relationships , the exact quantitative portions as well as the unclear portions must be taken into consideration together to improve the identification of key temperatures. I n this paper, a fuzzy cluster analysis was used to select the key temperatures. The substance of identifying the key temperatures is to group all temperatures b y their relativity, and then to select a temperature from each group as the repr esentation. A fuzzy cluster analysis can uncover the relationships between t he thermal field and deformations more truly and thoroughly. A fuzzy cluster ana lysis is the cluster analysis based on fuzzy sets. Given U={u i|i=0,...,N}, in which u i is the temperature measured, a fuzzy matrix R can be obta ined. The transfer close package t(R) can be deduced from R. A fuzzy clu ster of U then conducts on the basis of t(R). Based on the fuzzy cluster analysis discussed above, this paper identified the k ey temperatures of a horizontal machining center. The number of the temperatures measured was reduced to 4 from 32, and then the multiple regression relationshi p models between the 4 temperatures and the thermal deformations of the spindle were drawn. The remnant errors between the regression models and measured deform ations reached a satisfying low level. At the same time, the decreasing of tempe rature variable number improved the efficiency of measure and analysis greatly.
