To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating sched...To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating scheduling problems domain of dual-armed cluster tools,a non-integer programming model was set up with a minimizing objective function of the makespan.Combining characteristics of residency time and reentrant constraints,a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools.Finally,the experiments were designed to evaluate the proposed algorithm.The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.展开更多
To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an obj...To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools.Firstly,mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain.Resource conflicts were analyzed in the built scheduling model,and policies to solve resource conflicts were built.A scheduling algorithm was developed.Finally,the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations.Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.展开更多
The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone t...The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone to uncertainties such as model parameter variations and disturbances. Robust optimal tracking controller design for this kind of precision stages with mass and damping ratio uncertainties was researched. The mass and damping ratio uncertainties were modeled as the structured parametric uncertainty model. An identification method for obtaining the parametric uncertainties was developed by using unbiased least square technique. The instantaneous frequency bandwidth of the external disturbance signals was analyzed by using short time Fourier transform technique. A two loop tracking control strategy that combines the p-synthesis and the disturbance observer （DOB） techniques was proposed. The p-synthesis technique was used to design robust optimal controllers based on structured uncertainty models. By complementing the/z controller, the DOB was applied to further improving the disturbance rejection performance. To evaluate the positioning performance of the proposed control strategy, the comparative experiments were conducted on a prototype micro milling machine among four control schemes： the proposed two-loop tracking control, the single loop μ control, the PID control and the PID with DOB control. The disturbance rejection performances, the root mean square （RMS） tracking errors and the performance robustness of different control schemes were studied. The results reveal that the proposed control scheme has the best positioning performance. It reduces the maximal errors caused by disturbance forces such as friction force by 60% and the RMS errors by 63.4% compared with the PID control. Compared to PID with DOB control, it reduces the RMS errors by 29.6%.展开更多
A new problem that classical statistical methods are incapable of solving is reliability modeling and assessment when multiple numerical control machine tools(NCMTs) reveal zero failures after a reliability test. Thus...A new problem that classical statistical methods are incapable of solving is reliability modeling and assessment when multiple numerical control machine tools(NCMTs) reveal zero failures after a reliability test. Thus, the zero-failure data form and corresponding Bayesian model are developed to solve the zero-failure problem of NCMTs, for which no previous suitable statistical model has been developed. An expert-judgment process that incorporates prior information is presented to solve the difficulty in obtaining reliable prior distributions of Weibull parameters. The equations for the posterior distribution of the parameter vector and the Markov chain Monte Carlo(MCMC) algorithm are derived to solve the difficulty of calculating high-dimensional integration and to obtain parameter estimators. The proposed method is applied to a real case; a corresponding programming code and trick are developed to implement an MCMC simulation in Win BUGS, and a mean time between failures(MTBF) of 1057.9 h is obtained. Given its ability to combine expert judgment, prior information, and data, the proposed reliability modeling and assessment method under the zero failure of NCMTs is validated.展开更多
There were only two kinds of superhard tool material at the past, i.e. diamond and cubic boron nitride (CBN). Manmade diamond and CBN are manufactured by the middle of 20th century. Various manufacturing methods and m...There were only two kinds of superhard tool material at the past, i.e. diamond and cubic boron nitride (CBN). Manmade diamond and CBN are manufactured by the middle of 20th century. Various manufacturing methods and manmade superhard materials were developed later. They were widely used in different industry and science areas. Recently, a new kind of superhard tool material, C 3N 4 coating film, had been developed. American physical scientists, A. M. Liu and M. L. Cohen, designed a new kind of inorganic compound C 3N 4 with the theory of molecule engineering. According to calculation, it can reach or even exceed the hardness of diamond, so material scientists and technique circles draw their attention to it. A high speed steel twist drill coated with C 3N 4 film is applied to the drilling hole process on steel workpiece in cutting tests, the tool life is increased greatly. When the C 3N 4 film is coated on the cemented carbide inserts, the cutting performance is improved, but is not good enough. The data of mechanical performance and cutting tests about this kind of new tool material is given in this paper, it shows that C 3N 4 has a promising future. The anti-wear ability of cutting tool increases sharply after C 3N 4 being coated on HSS tool. Coated HSS drill also has some benefit after being reground. The tool life prolongs after C 3N 4 being coated on cemented carbide inserts, but is not so long as that of C 3N 4 coated HSS tool. When machining PRCM with C 3N 4 thin-film coated cemented carbide tool, the cutting performance is poor and it is much better when machining PRCM with PCBN, PCD compound plates and CVD thick-film coated cutting tool. Some relative aspects need to be deeply discussed and researched, e.g. the existing coating techniques is not good enough and should be improved in the future, the film thickness should be optimized and try to find out the most effective value, the binding force and mutual effect between coated film and substrate need to be studied furtherly, etc.展开更多
A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are...A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are developed as design and mask pattern verification module,database module, and device characteristics simulation module. All the operations are controlled under Microsoft Windows GUI interface. This leads to a reduced design and fabrication cycle, workload and cost. With the knowledge-based library for intelligent design and Lotus Notes database for distributed and networked engineering database management (EDM) and effective control of documents, a new enterprise-leveled, computer-integrated design and manufacturing system (CIDMS)can be established for monolithic and hybrid device design (not only confined to SAW device).展开更多
An investigation has been carried out to compare th e cutting performance and tool life evaluation of high speed steel broach samp les. The comparison has been done between conventional M2 and Anti-Segregation Process...An investigation has been carried out to compare th e cutting performance and tool life evaluation of high speed steel broach samp les. The comparison has been done between conventional M2 and Anti-Segregation Process (ASP) ASP53 and ASP30 high speed steel broach samples. The ASP53 was a development material. The cutting performance was evaluated by measuring the c utting forces and calculating the specific cutting energy, an indicator of cutti ng performance. As the roughness of the machined surface is an important criter ion in the evaluation of performance of a tool, the surface roughness of the workpiece was studied as a function of undeformed chip thickness. The workpiec e material was 150M36 alloy steel used in manufacture of automobile engines. Th e performance tests were conducted at two cutting speeds, which were 0 7 m/min and 10.5 m/min respectively. This allowed a better understanding of the effect of cutting speed on tool performance. The wear tests were performed at a cuttin g speed on 10.5 m/min. The cutting edges of ASP broach samples were finer compared to that of M2. Ther e was no practical difference in the cutting forces and the specific cutting ene rgy while cutting with MS, ASP30 and ASP53 broach samples. The ASP30 and ASP53 tools have a better surface roughness on the machined surface than that of M2 at both cutting speeds. The ASP30 gave 2.25 times the life and an improved surfac e finish compared to M2 steel. The ASP53 gave 1.3 times the life of M2 steel. These results should prove useful to the tool designer and manufacturing enginee r.展开更多
0 Introduction Economy and the protection of the environment are important topics.We are competent to talk about these topics.Due to the expanding areas of application for highprecision and electroplated diamond tools...0 Introduction Economy and the protection of the environment are important topics.We are competent to talk about these topics.Due to the expanding areas of application for highprecision and electroplated diamond tools with reproducible quality and long life,of course the aspects of economy and environmental protection gain increasing significance.In this lecture we will explain and show that economical aspects and environmental aspects in diamond electro-plating do not contradict,but rather complement each other.展开更多
The research and development of various classes of ceramic cutting tools in China are described,because manufacturing efficiency is fundamental to the growth of China's economy.
基金Projects(7107111561273035)supported by the National Natural Science Foundation of China
文摘To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating scheduling problems domain of dual-armed cluster tools,a non-integer programming model was set up with a minimizing objective function of the makespan.Combining characteristics of residency time and reentrant constraints,a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools.Finally,the experiments were designed to evaluate the proposed algorithm.The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.
基金Projects(71071115,60574054) supported by the National Natural Science Foundation of China
文摘To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools.Firstly,mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain.Resource conflicts were analyzed in the built scheduling model,and policies to solve resource conflicts were built.A scheduling algorithm was developed.Finally,the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations.Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.
基金Project(50875257) supported by the National Natural Science Foundation of China
文摘The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone to uncertainties such as model parameter variations and disturbances. Robust optimal tracking controller design for this kind of precision stages with mass and damping ratio uncertainties was researched. The mass and damping ratio uncertainties were modeled as the structured parametric uncertainty model. An identification method for obtaining the parametric uncertainties was developed by using unbiased least square technique. The instantaneous frequency bandwidth of the external disturbance signals was analyzed by using short time Fourier transform technique. A two loop tracking control strategy that combines the p-synthesis and the disturbance observer （DOB） techniques was proposed. The p-synthesis technique was used to design robust optimal controllers based on structured uncertainty models. By complementing the/z controller, the DOB was applied to further improving the disturbance rejection performance. To evaluate the positioning performance of the proposed control strategy, the comparative experiments were conducted on a prototype micro milling machine among four control schemes： the proposed two-loop tracking control, the single loop μ control, the PID control and the PID with DOB control. The disturbance rejection performances, the root mean square （RMS） tracking errors and the performance robustness of different control schemes were studied. The results reveal that the proposed control scheme has the best positioning performance. It reduces the maximal errors caused by disturbance forces such as friction force by 60% and the RMS errors by 63.4% compared with the PID control. Compared to PID with DOB control, it reduces the RMS errors by 29.6%.
基金Project(2014ZX04014-011)supported by State Key Science&Technology Program of ChinaProject([2016]414)supported by the 13th Five-year Program of Education Department of Jilin Province,China
文摘A new problem that classical statistical methods are incapable of solving is reliability modeling and assessment when multiple numerical control machine tools(NCMTs) reveal zero failures after a reliability test. Thus, the zero-failure data form and corresponding Bayesian model are developed to solve the zero-failure problem of NCMTs, for which no previous suitable statistical model has been developed. An expert-judgment process that incorporates prior information is presented to solve the difficulty in obtaining reliable prior distributions of Weibull parameters. The equations for the posterior distribution of the parameter vector and the Markov chain Monte Carlo(MCMC) algorithm are derived to solve the difficulty of calculating high-dimensional integration and to obtain parameter estimators. The proposed method is applied to a real case; a corresponding programming code and trick are developed to implement an MCMC simulation in Win BUGS, and a mean time between failures(MTBF) of 1057.9 h is obtained. Given its ability to combine expert judgment, prior information, and data, the proposed reliability modeling and assessment method under the zero failure of NCMTs is validated.
文摘There were only two kinds of superhard tool material at the past, i.e. diamond and cubic boron nitride (CBN). Manmade diamond and CBN are manufactured by the middle of 20th century. Various manufacturing methods and manmade superhard materials were developed later. They were widely used in different industry and science areas. Recently, a new kind of superhard tool material, C 3N 4 coating film, had been developed. American physical scientists, A. M. Liu and M. L. Cohen, designed a new kind of inorganic compound C 3N 4 with the theory of molecule engineering. According to calculation, it can reach or even exceed the hardness of diamond, so material scientists and technique circles draw their attention to it. A high speed steel twist drill coated with C 3N 4 film is applied to the drilling hole process on steel workpiece in cutting tests, the tool life is increased greatly. When the C 3N 4 film is coated on the cemented carbide inserts, the cutting performance is improved, but is not good enough. The data of mechanical performance and cutting tests about this kind of new tool material is given in this paper, it shows that C 3N 4 has a promising future. The anti-wear ability of cutting tool increases sharply after C 3N 4 being coated on HSS tool. Coated HSS drill also has some benefit after being reground. The tool life prolongs after C 3N 4 being coated on cemented carbide inserts, but is not so long as that of C 3N 4 coated HSS tool. When machining PRCM with C 3N 4 thin-film coated cemented carbide tool, the cutting performance is poor and it is much better when machining PRCM with PCBN, PCD compound plates and CVD thick-film coated cutting tool. Some relative aspects need to be deeply discussed and researched, e.g. the existing coating techniques is not good enough and should be improved in the future, the film thickness should be optimized and try to find out the most effective value, the binding force and mutual effect between coated film and substrate need to be studied furtherly, etc.
文摘A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are developed as design and mask pattern verification module,database module, and device characteristics simulation module. All the operations are controlled under Microsoft Windows GUI interface. This leads to a reduced design and fabrication cycle, workload and cost. With the knowledge-based library for intelligent design and Lotus Notes database for distributed and networked engineering database management (EDM) and effective control of documents, a new enterprise-leveled, computer-integrated design and manufacturing system (CIDMS)can be established for monolithic and hybrid device design (not only confined to SAW device).
文摘An investigation has been carried out to compare th e cutting performance and tool life evaluation of high speed steel broach samp les. The comparison has been done between conventional M2 and Anti-Segregation Process (ASP) ASP53 and ASP30 high speed steel broach samples. The ASP53 was a development material. The cutting performance was evaluated by measuring the c utting forces and calculating the specific cutting energy, an indicator of cutti ng performance. As the roughness of the machined surface is an important criter ion in the evaluation of performance of a tool, the surface roughness of the workpiece was studied as a function of undeformed chip thickness. The workpiec e material was 150M36 alloy steel used in manufacture of automobile engines. Th e performance tests were conducted at two cutting speeds, which were 0 7 m/min and 10.5 m/min respectively. This allowed a better understanding of the effect of cutting speed on tool performance. The wear tests were performed at a cuttin g speed on 10.5 m/min. The cutting edges of ASP broach samples were finer compared to that of M2. Ther e was no practical difference in the cutting forces and the specific cutting ene rgy while cutting with MS, ASP30 and ASP53 broach samples. The ASP30 and ASP53 tools have a better surface roughness on the machined surface than that of M2 at both cutting speeds. The ASP30 gave 2.25 times the life and an improved surfac e finish compared to M2 steel. The ASP53 gave 1.3 times the life of M2 steel. These results should prove useful to the tool designer and manufacturing enginee r.
文摘0 Introduction Economy and the protection of the environment are important topics.We are competent to talk about these topics.Due to the expanding areas of application for highprecision and electroplated diamond tools with reproducible quality and long life,of course the aspects of economy and environmental protection gain increasing significance.In this lecture we will explain and show that economical aspects and environmental aspects in diamond electro-plating do not contradict,but rather complement each other.
文摘The research and development of various classes of ceramic cutting tools in China are described,because manufacturing efficiency is fundamental to the growth of China's economy.
