This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. In this context, the present study gives a review on selected combinations of conventional and ion...This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. In this context, the present study gives a review on selected combinations of conventional and ion deposition techniques with different broadband online spectrophotometric systems. Besides two systems operating in the VIS- and NIR-spectral range in combination with ion processes, also a monochromator system developed for conventional deposition processes in the DUV/VUV-spectral range will be discussed. The considerations will be concluded by a comparison of the major advantages of the specific combinations of processes with online monitoring concepts and by a brief outlook concerning future challenges.展开更多
文摘采用离子束辅助沉积(ion beam-assisted deposition,IBAD)技术在非织构的金属基带上沉积双轴织构的MgO薄膜,研究了不同Ar^(+)离子束流能量对MgO双轴织构和表面形貌的影响.结果表明:在700∼1000 eV离子能量范围内,MgO薄膜的双轴织构随离子能量的增加而改善;在1000 eV离子能量下,IBAD-MgO薄膜的面内半高全宽(full-width at half-maximum,FWHM)∆_(ϕ)和面外FWHM∆ω分别为6°和2°;随着离子能量的增加,MgO薄膜的表面形貌并无明显区别,其表面粗糙度(5µm×5µm)均方根(root mean square,RMS)均在5∼6 nm.该研究证明了较高的Ar^(+)离子束能量可以提高IBAD-MgO薄膜的织构质量,对于双轴织构薄膜的稳定制备具有重要意义.
文摘This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. In this context, the present study gives a review on selected combinations of conventional and ion deposition techniques with different broadband online spectrophotometric systems. Besides two systems operating in the VIS- and NIR-spectral range in combination with ion processes, also a monochromator system developed for conventional deposition processes in the DUV/VUV-spectral range will be discussed. The considerations will be concluded by a comparison of the major advantages of the specific combinations of processes with online monitoring concepts and by a brief outlook concerning future challenges.
