In this paper,general principle of the Surface Acoustic Wave(SAW) sensor in wired and wireless con-figurations will be developed and a review of recent works concerning the field of high temperature applications will ...In this paper,general principle of the Surface Acoustic Wave(SAW) sensor in wired and wireless con-figurations will be developed and a review of recent works concerning the field of high temperature applications will be presented.The first part will be devoted to aspects of data transmission and processing.Both configurations of SAW de-vice,delay line and resonator,will be discussed as well as the remote interrogation techniques used to collect and to proc-ess signal.The second part will be devoted to the material aspects.Indeed,knowing that the conventional piezoelectric substrates such as quartz or lithium niobate cannot be used at high temperature,the choice of the material constituting the SAW device(substrate & electrodes) is one of the challenges to face.We will focus our discussion on the Langasite,the current reference for high temperature applications,and on the AlN/Sapphire structure,the very promising alternative for application where the use of high frequency is required.展开更多
基金supported by the REGION LORRAINE,Contrat Projet Etat Région 2007~2013Ple de Recherche Scientifique et Technologique.Matériaux,Energie,Procédés,Produits:Matériaux fonctionnels micro-et nanostructurés pour la réalisation de micro-et nanosystèmes."
文摘In this paper,general principle of the Surface Acoustic Wave(SAW) sensor in wired and wireless con-figurations will be developed and a review of recent works concerning the field of high temperature applications will be presented.The first part will be devoted to aspects of data transmission and processing.Both configurations of SAW de-vice,delay line and resonator,will be discussed as well as the remote interrogation techniques used to collect and to proc-ess signal.The second part will be devoted to the material aspects.Indeed,knowing that the conventional piezoelectric substrates such as quartz or lithium niobate cannot be used at high temperature,the choice of the material constituting the SAW device(substrate & electrodes) is one of the challenges to face.We will focus our discussion on the Langasite,the current reference for high temperature applications,and on the AlN/Sapphire structure,the very promising alternative for application where the use of high frequency is required.
