ITO （indium oxide doped with tin） thin films were deposited on glass substrates by using ITO pellet with a composition of w（In2O3）=90% and w（SnO2）=10% by electron beam evaporated with End-Hall ion source assiste...ITO （indium oxide doped with tin） thin films were deposited on glass substrates by using ITO pellet with a composition of w（In2O3）=90% and w（SnO2）=10% by electron beam evaporated with End-Hall ion source assisted without extra heating. The rate of deposition and flow rate of oxygen were measured and changed to obtain the best properties of ITO thin films. Furthermore, the post annealing process was done in vacuum at different annealing temperatures for 2 h and at 400℃ for different keeping time, respectively. The relation between optical, electrical properties and structure was discussed in detail.展开更多
研究质谱的离子传输气体动力学特征对理解和提升质谱仪器灵敏度具有重要意义。基于纳维-斯托克斯(NavierStokes)方程和直接蒙特卡洛(Direct Simulation Monte Carlo)方法联用,可以计算获得气体从大气压连续流到真空稀薄流的流场特征,进...研究质谱的离子传输气体动力学特征对理解和提升质谱仪器灵敏度具有重要意义。基于纳维-斯托克斯(NavierStokes)方程和直接蒙特卡洛(Direct Simulation Monte Carlo)方法联用,可以计算获得气体从大气压连续流到真空稀薄流的流场特征,进一步与电场仿真耦合,可以获得离子的传输与空间分布信息,评价离子光学器件性能。工作基于光电离质谱,构建了毛细管进样、光电离源和取样锥的组合结构模型,建立了离子传输跨流态多物理场仿真方法,得到了两种结构光电离源电极对离子传输效率的影响,并利用自制光电离飞行时间质谱装置验证了仿真方法的可靠性。工作为复杂流场和电场环境下质谱光电离源及离子传输装置设计提供了理论指导依据。展开更多
文摘ITO （indium oxide doped with tin） thin films were deposited on glass substrates by using ITO pellet with a composition of w（In2O3）=90% and w（SnO2）=10% by electron beam evaporated with End-Hall ion source assisted without extra heating. The rate of deposition and flow rate of oxygen were measured and changed to obtain the best properties of ITO thin films. Furthermore, the post annealing process was done in vacuum at different annealing temperatures for 2 h and at 400℃ for different keeping time, respectively. The relation between optical, electrical properties and structure was discussed in detail.
文摘研究质谱的离子传输气体动力学特征对理解和提升质谱仪器灵敏度具有重要意义。基于纳维-斯托克斯(NavierStokes)方程和直接蒙特卡洛(Direct Simulation Monte Carlo)方法联用,可以计算获得气体从大气压连续流到真空稀薄流的流场特征,进一步与电场仿真耦合,可以获得离子的传输与空间分布信息,评价离子光学器件性能。工作基于光电离质谱,构建了毛细管进样、光电离源和取样锥的组合结构模型,建立了离子传输跨流态多物理场仿真方法,得到了两种结构光电离源电极对离子传输效率的影响,并利用自制光电离飞行时间质谱装置验证了仿真方法的可靠性。工作为复杂流场和电场环境下质谱光电离源及离子传输装置设计提供了理论指导依据。
